摘要
利用低压 -金属有机汽相外延 (L P- MOCVD)工艺首先在二氧化硅衬底上生长硫化锌 (Zn S)薄膜 ,然后 ,将硫化锌薄膜在氧气中于不同温度下进行热氧化 ,制备出高质量的纳米氧化锌 (Zn O )薄膜 .X射线衍射 (XRD)结果表明 ,氧化锌具有六角纤锌矿晶体结构 .90 0℃氧化样品的光致发光 (PL )谱中 ,在波长为 3.3e V处观察到一束强紫外光致发光和相当弱的深能级发射 .紫外发光强度与深能级发射强度之比是 80 ,表明纳米 Zn O薄膜的高质量结晶 .在受激发射实验中观察到紫外激光发射 .
High quality nanocrystalline ZnO film is prepared by using thermal oxidation of ZnS thin film,grown on a SiO 2 subtract by the low-pressure metalorganic chemical vapor deposition (LP-MOCVD) technique. The X-ray diffraction (XRD) patterns show that ZnO thin film has a hexagonal wurtzite structure.In photoluminescence (PL) measurements,a strong PL with a full width at half maximum (FWHM) of 62meV around 3.3eV is observed from the samples oxidized at 900℃ at room temperature.The PL intensity ratio of the UV emission to the deep-level emission is 80 at room temperature,providing evidence of the high quality of the nanocrystalline ZnO films.Afterwards,ultraviolet lasing from the ZnO thin films is observed at room temperature.
基金
中国科学院百人计划项目
国家自然科学基金 (批准号 :698962 60 )
长春光学精密机械与物理研究所创新基金
国家教委杰出青年教师基金
吉林省杰出青年学者计划
黑龙江省自然科学基金资助项目~~
