摘要
采用直流磁控溅射法在硅基底上交替沉积类金刚石碳(DLC)和氮化碳(CNx)薄膜,制备了不同DLC层厚度的CNx/DLC纳米多层膜。使用X射线衍射、场发射扫描电子显微镜、X射线光电子谱、Raman光谱等测试手段表征了薄膜的微观组织形貌、化学成分和原子价键结构等。采用原位纳米压入技术、涂层附着力划痕仪、球盘式摩擦磨损试验机对薄膜的力学和摩擦学性能进行了测试。结果表明:所制备的CNx/DLC多层膜均为微晶或非晶结构,组织致密。随着DLC层厚度的减小,多层膜内sp3杂化键的含量先升高后下降,压应力由135 MPa增至538 MPa,结合力先上升后降低,而磨损率则呈相反变化趋势。多层膜在大气和真空中的摩擦因数约为0.17和0.15,DLC层厚度的影响很小。DLC层厚度为4.5 nm的多层膜的性能最佳,硬度可达44.1 GPa,最低磨损率为3.2×10-18m3/(N·m)。
CN_x/DLC nano-multilayer films with different diamond-like carbon(DLC) layer thicknesses were prepared via the alternate deposition of DLC layer and carbon nitride(CN_x) layer on silicon substrate by the DC magnetron sputtering technique. The microstructure, chemical composition and atomic valence bond structure of the films were characterized by X-ray diffraction, field emission scanning electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. The mechanical and tribological properties of the films were evaluated by in-situ nano-indentation technology, coating adhesion tester and ball-and-disk wear tester. The results show that the CN_x/DLC multilayer films are amorphous and dense structure. The content of sp3 hybrid bonds in the multilayer films firstly increases and then decreases, the compressive stress increases from 135 MPa to 538 MPa, and the bonding force firstly increases and then decreases, but the wear rate firstly decreases and then increases as the DLC layer thickness decreases. The friction coefficients of the multilayer films in atmosphere and in vacuum are 0.17 and 0.15, respectively, and the DLC layer thickness has a slight effect on the friction coefficient. The multilayer film with the DLC layer thickness of 4.5 nm has the optimum performance, having the maximum hardness of 44.1 GPa and the minimum wear rate of 3.2×10-18m3/(N·m).
作者
杨芳儿
龚润泽
王贡启
杨烁妍
常新新
郑晓华
YANG Fanger;GONG Runze;WANG Gongqi;YANG Shuoyan;CHANG Xinxin;ZHENG Xiaohua(College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China)
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2019年第1期62-70,共9页
Journal of The Chinese Ceramic Society
基金
浙江省自然科学基金资助项目(LY15E010007)
关键词
类金刚石碳膜
氮化碳薄膜
多层膜
硬度
耐磨性
diamond-like carbon film
carbon nitride film
multilayer film
hardness
wear resistance
