摘要
近年来,随着生活水平提高,健康生活和安全保护备受社会关注,对有毒易燃易爆气体的检测愈来愈重视,尤其表现在排放检测、消防安全、石油化工和航天航空方面等。金属氧化物半导体气敏传感器由于具有高灵敏度、低成本、稳定性好等优点而被广泛应用于气敏传感领域。三氧化二铟(In2O3)作为一种典型n型宽禁带半导体,因具有透明导电、电阻率低、气敏性能较好等特点成为一种良好的气敏材料。本文综述了近几年来微纳结构In2O3气敏传感器的研究进展,分别对In2O3气敏材料的结构、气敏机理、不同形貌、金属和金属氧化物改性以及碳材料复合等方面进行介绍,分析了In2O3气敏传感器存在问题,并进一步指出In2O3气敏传感器在未来的研究方向。
In recent years,with the improvement of living standards,the healthy living and safety protection have received a great deal of attention,and the detection of toxic,flammable and explosive gases has been paid increasing concern,especially in the fields such as emission testing,fire control,petrochemical industry and aerospace.Metal oxide semiconducting gas sensors are widely used in the field of gas sensing due to their high sensitivity,low cost,and good stability.As a typical n-type wide bandgap semiconductor,indium trioxide(Indium Oxide)has become a good gas-sensing material due to its transparent conductivity,low resistivity and good gas sensitivity.In this paper,the research progress of micro/nano-structured indium oxide gas sensor in recent years is reviewed.The structure,gas sensing mechanism,different morphology,metal and metal oxide modification and carbon composite of indium oxide gas sensing materials are discussed.The problems and the trends of indium oxide gas sensor are also analyzed.
作者
周仕强
卢清杰
陈明鹏
张瑾
柳清菊
ZHOUShiqiang;LU Qingjie;CHEN Mingpeng;ZHANG Jin;LIU Qingju(School of Materials Science and Engineering,Yunnan University,Key Laboratory of Micro-Nano Materials and Technology,Yunnan University,Kunming 650091,China)
出处
《功能材料与器件学报》
CAS
2019年第2期65-76,共12页
Journal of Functional Materials and Devices
基金
国家自然科学基金项目(51562038)
云南省自然科学基金重点项目(2018FY001-011)
