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形状记忆合金薄膜在微机电系统中的应用 被引量:4

Application of shape memory alloy thin films in MEMS
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摘要 形状记忆合金 (SMA)薄膜因其特有的形状记忆合金效应、超弹性行为以及薄膜材料所特有的优越性能 ,而在微机电系统中的微驱动器和微传感器方面极具应用潜力。本文主要介绍了以TiNi基合金为主的形状记忆合金薄膜在微驱动器和微传感器上的国内外应用性研究现状 ,并展望了其未来的发展趋势。 Thin film of shape memory alloy has a great application potential for microactuator and microsensor in MEMS due to its perfect shape memory effect, superelasticity, and its particular performance as thin film. In this paper, application research statuses about microactuators and microsensors with thin films of shape memory alloy were presented, and at last their futures were also prospected.
出处 《功能材料》 EI CAS CSCD 北大核心 2002年第6期594-597,共4页 Journal of Functional Materials
关键词 形状记忆合金薄膜 微机电系统 形状记忆效应 超弹性 微驱动器 微传感器 shape memory alloys shape memory effect superelasticity MEMS microactuators microsensors
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