摘要
气动隔振是精密仪器和半导体制造中保持清洁、微振动工作环境的关键系统。被动气动隔离不能满足低频隔振的需求,甚至会产生共振现象。开发了一种基于等温容腔的主动气动隔振器,并采用H_(∞)控制方法抑制低频振动的干扰。首先,将等温材料填充到隔振器的腔室中,以减少充气和放气过程中温度变化的影响。然后,基于鲁棒H_(∞)控制理论,设计了一种能够抑制低频振动扰动、鲁棒性高的控制器。最后,应用1~10 Hz的激励信号测试气动隔振系统在H_(∞)主动控制情况下的性能,并与被动隔振效果进行比较。结果表明,等温材料的加入降低了腔室充放气过程的温度变化,主动控制方法提高了低频范围内的隔振性能,有效衰减了系统的谐振峰。
Pneumatic vibration isolation is a critical system for maintaining a clean,minimally vibrating work environment in precision instrumentation and semiconductor manufacturing.Passive pneumatic isolation cannot meet the needs of low-frequency vibration isolation and even generate resonance phenomena.An active pneumatic vibration isolator based on an isothermal cavity is developed,and a H_(∞)control method is used to suppress the interference of low-frequency vibration.First,isothermal material is used in the vibration isolator cavity to reduce temperature effects during inflation and deflation.Then,a controller based on Robust H_(∞)control theory is designed to suppress low-frequency vibrations robustly.Finally,an excitation signal of 1~10 Hz is applied to test the performance of the pneumatic vibration isolation system under H_(∞)active control and compare it with the passive vibration isolation effect.The results show that the incorporation of isothermal materials reduces the temperature variation of the chamber inflation and deflation process,and the active control method improves the vibration isolation performance in the low-frequency range and effectively attenuates the resonance peaks of the system.
作者
刘晓霞
许少峰
吴继繁
孙治博
王一轩
石岩
LIU Xiaoxia;XU Shaofeng;WU Jifan;SUN Zhibo;WANG Yixuan;SHI Yan(School of Automation Science and Electrical Engineering,Beihang University,Beijing 100191;Liupanshan Laboratory,Yinchuan,Ningxia 750002;Zhejiang Yiri Pneumatic Technology Co.,Ltd.,Ningbo,Zhejiang 315300;Engineering Training Center,Beihang University,Beijing 100191)
出处
《液压与气动》
北大核心
2024年第12期99-106,共8页
Chinese Hydraulics & Pneumatics
基金
国家自然科学基金(52205043)
宁波重点研发计划暨第二批“揭榜挂帅”专项(2023Z018)。
关键词
气动隔振
恒温室
温度变化
鲁棒H_(∞)控制
pneumatic vibration isolation
constant temperature room
temperature changes
Robust H_(∞)control
