摘要
作为有源相控阵雷达的关键组成部分,微波射频器件的尺寸与性能决定着雷达探测功能的有效发挥。引线键合是微波射频器件常用的互连技术,随着器件集成度的提高,键合引线的尺寸越来越小,如何保证封装高可靠性是行业亟待解决的问题。文中建立了引线键合互连结构的高精度参数化模型,通过热、电仿真和建立的疲劳寿命预测模型,进行了引线半径、拱高、跨距以及平台长度四种结构参数对引线键合工艺的热–力–电多领域分析,并开展了多参数的灵敏度研究。结果表明:四种结构参数会对引线热疲劳寿命和电性能产生不同程度的影响;对热疲劳寿命而言,引线半径的极差值为14.891×10^(5),对热可靠性的影响最大;对插入损耗而言,平台长度的极差值为0.7332,对电性能的影响最大。
As a key component of active phased array radar,the size and performance of microwave RF devices determine the performance of radar detection.Wire bonding is a commonly used interconnection technology for microwave RF devices.With the improvement of device integration,the size of bonding wires is becoming smaller and smaller.How to ensure high reliability of package is an urgent problem to be solved in the industry.A high-precision parameterized model for wire bonding interconnection structure is established in this paper.Through thermal and electrical simulation and the fatigue life prediction model,the thermal-mechanical-electrical analysis of different structural parameters on wire bonding process is conducted,and the sensitivity study on multiple parameters is also conducted.The results indicate that the four structural parameters have varying degrees of influence on the thermal fatigue life.The range of wire radius on thermal fatigue life is 14.891×10^(5),which has the greatest impact on thermal reliability;the range of platform length on insertion loss is 0.7332,which has the greatest impact on electrical performance.
作者
李广泌
薛松
刘少义
黄建伦
吴文志
王志海
王从思
LI Guangmi;XUE Song;LIU Shaoyi;HUANG Jianlun;WU Wenzhi;WANG Zhihai;WANG Congsi(Guangzhou Institute of Technology,Xidian University,Guangzhou 510555,China;State Key Laboratory of Electromechanical Integrated Manufacturing of High-Performance Electronic Equipments,Xidian University,Xi’an 710071,China;School of Mechano-Electronic Engineering,Xidian University,Xi’an 710071,China;The 38th Research Institute of CETC,Hefei 230088,China)
出处
《电子机械工程》
2024年第6期42-48,55,共8页
Electro-Mechanical Engineering
基金
国家重点研发计划项目(2021YFC2203600)
国家自然科学基金资助项目(U23A6017)
陕西省秦创原“科学家+工程师”队伍建设项目(2022KXJ-030)。
关键词
引线键合
可靠性
疲劳寿命预测
电性能
wire bonding
reliability
fatigue life prediction
electrical performance
