摘要
微区应力在印制电路板焊接、透明导电膜镀制、显微光学系统装配等过程中普遍存在,将降低器件的性能和运行安全性。现有应力测量系统适用于大尺度的光学材料,不能用于微区应力测量。针对微区应力非接触无损测量问题,提出了一种基于显微技术的微区应力测量方案,该方案融合了基于偏振的光学应力测量系统与对微区成像的显微系统,可实现横向尺度为毫米或亚毫米量级区域范围的应力测量。借鉴国家标准GB/T 7962.5—2010的2.3%相对误差测量精度要求,开展了测量装置的系统设计与元件误差分析研究。为验证理论设计与测量方案的有效性,构建了一套测量微区应力分布的装置,工作波长为532 nm,显微物镜倍率为50×,相应的理论空间分辨率为0.59μm。选择工作于532 nm、相位延迟量由计量部门赋值的零级1/4波片为测量对象,测量区域直径为0.96 mm相位延迟量测量结果为1.595 rad。经与中国计量科学研究院的检测结果1.604 rad比对,绝对误差为0.009 rad,相对误差仅为0.6%,验证了测量装置的测量精度。利用该装置,检测了石英玻璃的不同测量区域在施加不同大小预压力下的相位分布。结果表明:该测量方法的测量误差在1%内,可检测出现有测量系统无法分辨的微小区域应力。
Microregion stress is a prevalent issue in printed-circuit board welding,transparent conductive-film plating,and micro-optical system assembly and will reduce the performance and operation safety of devices.Existing stress measurement systems are suitable for large-scale optical materials but cannot be used for microregion stress measurements.To solve the problem of noncontact and nondestructive measurement of microregion stress,a microregion stress measurement scheme based on microscopic technology was proposed.The proposed scheme integrated an optical stress measurement system based on polarization with a micro-imaging microscopic system,which could realize stress measurement at the transverse scale of millimeter or submillimeter.Taking the 2.3%relative error measurement accuracy requirement of the national standard GB/T 7962.5—2010 as an example,the system design and component error analysis of the measuring device were performed.To validate the theoretical design and measurement scheme,a set of devices was constructed for measuring stress distribution in the microregion.The device operated at a working wavelength of 532 nm with a microscopic objective power of 50×and a corresponding theoretical spatial resolution of 0.59μm.A zero-order 1/4 wave plate working at 532 nm with a phase delay value assigned by the measuring department was the measuring object.The diameter of the measuring area was 0.96 mm,and the phase delay was 1.595 rad.Comparison with the testing result of the China Institute of Metrology 1.604 rad,the absolute error is 0.009 rad,and the relative error is only 0.6%,thereby verifying the measuring accuracy of the measuring device.Using this device,the phase distribution of quartz glass was measured in different measurement areas under different prepressures.The results show that the measurement error of this method is within 1%and there are small regional stresses that cannot be resolved by the measuring system.
作者
郑杰
高志山
金能
郭珍艳
袁群
朱丹
车啸宇
雷李华
傅云霞
Zheng Jie;Gao Zhishan;Jin Neng;Guo Zhenyan;Yuan Qun;Zhu Dan;Che Xiaoyu;Lei Lihua;Fu Yunxia(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,Jiangsu,China;Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2024年第17期179-187,共9页
Laser & Optoelectronics Progress
基金
国家自然科学基金(62175107,62205148)
国家重点研发计划(2022YFF0706302)
上海市自然科学基金(21ZR1483100)
上海市优秀学术/技术带头人计划(21XD1425000)。
关键词
测量
微区
应力检测
显微技术
相位延迟
measurement
micro region
stress measurement
microscopy
phase delay
