摘要
为设计具有良好静动态特性的柔性微定位平台,提出了两种基于柔性梁与圆弧形柔性铰链所组成的柔性模块的柔性运动副。首先,基于该运动副设计了新型平面2自由度微定位平台结构;其次,采用柔度矩阵法建立了平台力-位移关系及输出位移的理论模型,基于传递矩阵法建立了平台固有频率与瞬时动力响应的理论模型,并通过有限元仿真验证了理论模型的正确性。理论研究与仿真验证表明,平台具有较高的静动态性能,其输入输出完全解耦,在0.3mm输入位移下丢失运动不超过1.8%;1阶固有频率为320.34 Hz,在0.1 s时间内动力响应与仿真趋势一致。最后,进行了平台静、动态性能的灵敏度分析和参数优化。结果表明,优化后的平台在同样驱动下丢失运动和固有频率分别优化提升了1.95%和43.9%,进一步提升了平台的动态性能。
In order to design a flexible micro positioning platform with good static and dynamic characteristics,two types of flexible kinematic pairs based on flexible modules composed of flexible beams and circular flexible hinges were proposed.Firstly,a novel planar two degrees of freedom micro positioning platform structure was designed based on the motion pair;secondly,a theoretical model of the platform's force-displacement relation and output displacement was established using the flexibility matrix method,and a theoretical model of the platform's natural frequency and instantaneous dynamic response was established based on the transfer matrix method;then,the correctness of the theoretical model was verified through finite element simulation.Theoretical research and simulation verification show that the platform has high static and dynamic performance,its input and output are fully decoupled,and the loss of motion does not exceed 1.8% under 0.3 mm input displacement;the first order natural frequency is 320.34 Hz,and the dynamic response is consistent with the simulation trend within 0.1 s.Finally,sensitivity analysis and parameter optimization of the static and dynamic performance of the platform were performed.The results show that the optimized platform has improved motion loss and natural frequency optimization by 1.95% and 43.9% respectively under the same drive,further improving the dynamic performance of the platform.
作者
桂和利
徐伟胜
许添旗
曹毅
Gui Heli;Xu Weisheng;Xu Tianqi;Cao Yi(School of Intelligent Manufacturing,Wuxi Institute of Technology,Wuxi 214151,China;School of Mechanical Engineering,Jiangnan University,Wuxi 214122,China;Jiangsu Key Laboratory of Advanced Food Manufacturing Equipment and Technology,Wuxi 214122,China)
出处
《机械传动》
北大核心
2024年第10期127-137,147,共12页
Journal of Mechanical Transmission
基金
高等学校学科创新引智计划(B18027)。
关键词
柔性机构
微定位平台
传递矩阵法
柔度矩阵法
参数优化
Compliant mechanism
Micro-positioning stage
Transfer matrix method
Flexibility matrix method
Parameter optimization
