摘要
通过多个衍射光学元件叠加可将不同元件的衍射功能集成到1个元件中,得到复合衍射光学元件.从一维光栅、菲涅耳波带片等简单结构出发,将其不同衍射作用的透过率函数相加,借助基于数字阵列微镜的无掩膜光刻设备刻写在1个光学元件上得到复合元件,通过程序模拟和实验测试分析元件的衍射特性,探究在叠加过程中相关参量对衍射图样的影响.实验结果表明:叠加后的复合元件结合了叠加前各元件的特性,可实现对入射光波前的调制,得到所需的振幅和相位分布.
Stacking multiple diffractive optical elements can integrate different functions into one element,resulting in a composite diffractive optical element.Starting from simple structures such as one-dimensional gratings and Fresnel zone plates,the transmittance functions of the different diffraction effects were added together.And a composite element could be obtained by engraving on an optical element using the DMD based maskless lithography device.The diffraction characteristics were analyzed using program simulation and experimental testing to explore the influence of corresponding parameters on the diffraction pattern during the superposition process.The experimental results showed that the composite elements combined the characteristics of the separate component,and achieved modulation of the incident light wavefront to obtain the required amplitude and phase distribution.
作者
王钰涵
唐浩原
李金环
刘华
WANG Yuhan;THANG Haoyuan;LI Jinhuan;LIU Hua(School of Physics,Northeast Normal University,Changchun 130024,China)
出处
《物理实验》
2024年第10期56-62,共7页
Physics Experimentation
基金
吉林省教育厅项目(No.JJKH20241424KJ)。
关键词
光栅
波带片
元件叠加
衍射
干涉
grating
zone plate
optical elements stacking
diffraction
interference
