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压电定位平台低阻尼谐振特性辨识及高带宽控制

Identification of low-damping resonance characteristics and the high-bandwidth control of a piezo-positioning stage
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摘要 该文研究降低低阻尼谐振特性对压电定位平台跟踪带宽的限制。首先,在Prandtl-Ishlinskii逆模型线性化的基础上,将基于脉冲响应的Hankel矩阵系统辨识法应用到压电定位平台线性动态特性的辨识中,并在其中提出一种改进的相关函数计算方法进一步提高低阻尼谐振频段的辨识精度。其次,根据辨识得到的传递函数模型,采用零极点对消加超前补偿器的方法设计陷波器补偿低阻尼反谐振及谐振特性,并在串联陷波器的基础上设计PI(proportional integral)控制器提高闭环回路的鲁棒性及跟踪性能。最后,试验结果表明,PI控制器的闭环带宽为97 Hz,含有陷波器的PI控制器闭环带宽为244 Hz,由于陷波器的加入,闭环带宽提高了151.5%,从而说明了该文辨识及控制方法的有效性。 The limitation of reducing low-damping resonance characteristics to the tracking bandwidth of a piezo-positioning stage was studied.Based on the linearization of the Prandtl-Ishlinskii inverse model,the impulse response-based Hankel matrix system identification method was applied to the identification of linear dynamic characteristics of the piezo-positioning stage,in which an improved method of correlation function calculation was proposed to further improve the accuracy of the identification of the low-damping resonance frequency band.Based on the transfer function model obtained by the identification,the zero-pole pair elimination method combined with an overshoot compensator was used to design a notch filter to compensate the low-damping anti-resonance and resonance characteristics,and the PI controller was designed based on the series trap to improve the closed-loop robustness and tracking performance.The experimental results show that the closed-loop bandwidth of the PI controller is 97 Hz,while the closed-loop bandwidth of the PI controller added with the notch filter is 244 Hz.Due to the addition of the notch filter,the closed-loop bandwidth is increased by 151.5%,thus illustrating the validity of the identification and control method.
作者 刘浩天 张桂林 周克敏 LIU Haotian;ZHANG Guilin;ZHOU Kemin(College of Electrical Engineering and Automation,Shandong University of Science and Technology,Qingdao 266590,China;Center for Advanced Control and Smart Operations,Nanjing University,Suzhou 215163,China)
出处 《振动与冲击》 EI CSCD 北大核心 2024年第18期287-296,共10页 Journal of Vibration and Shock
基金 国家自然科学基金重点项目(61933006)。
关键词 压电定位平台 谐振特性 相关函数 HANKEL矩阵 陷波器 piezo-positioning stage resonance characteristics correlation function Hankel matrix notch filter
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