摘要
针对微型三轴振动传感器研制,可用空间小且结构复杂和结构零件组合装配困难等问题,提出采用3个一体化模块交错组合的传感器设计方法,提高了空间利用率和装配精度。通过理论分析和有限元仿真,完成15 mm×15 mm×15 mm微型化传感器的优化设计,搭建显微镜成像封装系统和振动测试系统完成传感器的封装和性能测试。实验表明,该传感器X、Y、Z轴的谐振频率分别为990、975和960 Hz,且在0~700 Hz频率范围内平坦度好,灵敏度分别为19.10、19.28和20.01 pm/g,具有轻量化和三轴测试性能一致性高的优点。搭建微角振动测试系统,验证传感器的性能,其角位移测量分辨率优于0.21μrad,线性度为0.998。
To solve the problems of small available space,complex structure,and difficult assembly of structural parts in the development of the miniature three-axis vibration sensor,this article proposes the use of three integrated module staggered combinations of the sensor design method to improve the space utilization rate and assembly accuracy.Through theoretical analysis and finite element simulation,the optimized design of the 15 mm×15 mm×15 mm miniaturized sensor is completed.The microscope imaging packaging system and the vibration testing system are established to complete the packaging and performance testing of the sensor.Experiments show that the resonant frequencies of X,Y,and Z axes of the sensor are 990,975,and 960 Hz,respectively.The flatness is good in the frequency range of 0~700 Hz,and the sensitivities are 19.10,19.28,and 20.01 pm/g,respectively,which has the advantages of lightweight and high consistency of the performance of the three-axis test.A micro-angular vibration test system is built to evaluate the performance of the sensor,which has an angular displacement measurement resolution better than 0.21μrad and a linearity of 0.998.
作者
黎琪慧
陈亚新
辛璟焘
董明利
李昆
Li Qihui;Chen Yaxin;Xin Jingtao;Dong Mingli;Li Kun(Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science&Technology University,Beijing 100192,China;Beijing Laboratory of Optical Fiber Sensing and System,Beijing Information Science&Technology University,Beijing 100016,China;Beijing Institute of Space Electromechanics,Beijing 100089,China;Guangzhou Nansha Intelligent Photonic Sensing Research Institute,Guangzhou 511462,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2024年第5期43-50,共8页
Chinese Journal of Scientific Instrument
基金
国家重点研发计划(2021YFA1003504)项目资助。
关键词
光纤布拉格光栅
振动传感器
三轴
微型化
振动测量
fiber Bragg gratings
vibration sensors
triaxial
miniaturization
vibration measurement
