摘要
以6 mm厚氧化铝陶瓷为研究对象,探讨基于QCW高功率光纤激光器的微孔制备工艺。研究激光峰值功率、脉冲宽度、脉冲频率和离焦量等激光工艺参数对微孔成形形貌及质量的影响规律。试验结果表明,在激光峰值功率为5.0~6.5 kW,脉宽4~8 ms,频率为50~100 Hz,离焦量为-3~-4 mm时,激光器能够在厚板陶瓷加工出高圆度、小锥度、少挂渣且无裂纹的倒锥微孔,微孔的半径可控范围为130~400μm,孔的锥度变化范围为-1.4°~-0.6°。通过对打孔过程的温度场进行仿真模拟,发现热量在微孔出口处的累积是造成加工孔形为倒锥的主要原因。
In this paper,the processing of micro hole on thick alumina ceramic by using a QCW high-power fiber laser was studied.The influence of laser process factors such as peak laser power,pulse width,pulse frequency,and defocusing amount on micro-hole shape and quality was primarily explored.The experimental results show that micro-holes with high roundness,minimal taper,reduced slagging,and no cracks can be achieved on thick alumina ceramic plates at a peak laser power of 5.0 to 6.5 kW,a pulse width of 4 to 8 ms,a frequency of 50 to 100 Hz,and a defocusing amount of-3 to-4 mm.The radius of the micro-hole can be controlled in the range of 130~400μm,and the taper of the hole can be varied in the range of-1.4°~-0.6°.By modelling the temperature field of the drilling process,it is discovered that the accumulation of heat near the exit of the micro-hole is the primary cause of the machined hole shape′s inverted taper.
作者
乔宏飞
何秀权
许杰
刘海星
王曦照
Qiao Hongfei;He Xiuquan;Xu Jie;Liu Haixing;Wang Xizhao(Institute of Laser and Intelligent Manufacturing Technology,South-Central Minzu University,Wuhan 430074,Hubei,China;College of Electronics and Information Engineering,South-Central Minzu University,Wuhan 430074,Hubei,China;Wuhan National Laboratory for Optoelectronics,Wuhan 430074,Hubei,China)
出处
《应用激光》
CSCD
北大核心
2024年第6期103-111,共9页
Applied Laser
关键词
QCW光纤激光器
厚板陶瓷
激光制孔
温度场模拟
QCW high-power fiber laser
thick plate ceramics
laser drilling
temperature field simulation
