摘要
利用JSM 6360型扫描电子显微镜配合能谱仪能较好地对材料进行微观结构与微区元素分析。介绍了JSM 6360型扫描电镜的基本控制要点、日常故障分析与处理措施及维护创新点,分析了对钨灯丝过早熔断、电镜x轴和y轴马达不旋转、z轴旋转卡簧易脱落、加热器损坏等常见故障进行快速处理的方法,结果可为同型号扫描电镜科研人员提供维修与维护方面的参考。
JSM 6360 scanning electron microscope combined with energy dispersive spectrometer could better analyze the microstructure and micro-element of the material.The basic control points,daily fault analysis and treatment measures and maintenance innovation points of JSM 6360 scanning electron microscope were introduced.The methods of rapid treatment of common faults such as premature fuse of tungsten filament,non-rotation of x-axis and y-axis motors of electron microscope,easy shedding of z-axis rotating clip spring and damage of heater were analyzed.The results could provide reference for maintenance and repair for researchers of the same type or scanning electron microscope.
作者
李君霞
段锋
郑小平
LI Junxia;DUAN Feng;ZHENG Xiaoping(College of Materials Science and Engineering,Xi’an University of Architecture and Technology,Xi’an 710055,China;Puyang Refractories Group Co.,Ltd.,Puyang 457100,China)
出处
《理化检验（物理分册）》
CAS
2024年第8期76-78,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
关键词
扫描电子显微镜
故障诊段
维修维护
钨灯丝
磨损
scanning electron microscope
fault diagnosis section
repair and maintenance
tungsten filament
wear
