摘要
在国家标准《微机电系统(MEMS)技术薄膜材料的弯曲试验方法》制定阶段,为验证该标准中测试方法的准确性和实用性,设计并制备了4种尺寸的悬臂梁结构,并利用纳米力学测试系统记录其弯曲形变过程,获取了待测结构的形变-应力曲线。通过该标准可实现薄膜材料弯曲力学性能的有效表征。对弯曲试验的测量数据进行分析,实验结果表明,基于该测试方法10次的重复性达到0.32%,同类型的测试结构具有较强的规律性,靠近悬臂梁根部的测试点表现出更高的机械刚度,与理论预测完全一致。因此,该标准中所采用的弯曲测试方法可重复性好,可用于薄膜材料的弯曲力学性能测试。
In the process of developing the Chinese national standard “Micro-electromechanical systems technology-Bend testing methods of thin film materials”,cantilever beam structures with different sizes were designed and prepared to verify the accuracy and practicality of the method used.Their bending deformation processes were recorded by nanoindentation instrumentation,and the deformation-stress curves of the structures were obtained.The bending mechanical properties of thin-film materials can be effectively characterized based on this standard,and the measured data from the bending tests were analyzed.The experimental results show that the repeatability over 10 tests reached 0.32% using this testing method,and the same type of test structure exhbits strong regularity.The test point near the anchor of the cantilever beam exhibits high deformation stiffness,fully consistent with the theoretical prediction.Therefore,the bending test method used in this paper has good repeatability and can be used for testing the bending mechanical properties of thin-film materials.
作者
黄鑫龙
李根梓
周龙飞
杨绍松
夏燕
董显山
来萍
夏长奉
宋辰阳
张晋熙
韩金哲
HUANG Xinlong;LI Genzi;ZHOU Longfei;YANG Shaosong;XIA Yan;DONG Xianshan;LAI Ping;XIA Changfeng;SONG Chenyang;ZHANG Jinxi;HAN Jinzhe(Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory,No.5 Electronics Research institute of the Ministry of Industry and Information Technology,Guangzhou 511370,China;Yanqi Lake Institute of Basic Manufacturing Technology(Beijing)Co.,Ltd.,Beijing 101407,China;CSMC Technologies Fab2 Co.,Ltd.,Wuxi 214028,China;Wuxi Sencoch SeMiconductor Co.,Ltd.,Wuxi 214000,China;Suzhou Institute of Quality and Standardization,Suzhou 215000,China)
出处
《压电与声光》
CAS
北大核心
2024年第4期524-528,共5页
Piezoelectrics & Acoustooptics
基金
国家重点研发计划(No.2022YFB3207105)
国家自然科学基金项目(No.U23A20638)
广东省重点领域研发计划(No.2022B0701180002)。
关键词
薄膜材料
微机电系统
悬臂梁
力学测试
弯曲试验
国家标准
thin-film materials
MEMS
cantilever beam
mechanical tests
bend testing
national standard
