摘要
Metalenses with achromatic performance offer a new opportunity for high-quality imaging with an ultracompact configuration;however,they suffer from complex fabrication processes and low focusing efficiency.In this study,we propose an efficient design method for achromatic microlenses on a wavelength scale using materials with low dispersion,an adequately designed convex surface,and a thickness profile distribution.By taking into account the absolute chromatic aberration,relative focal length shift(FLS),and numerical aperture(NA),microlens with a certain focal length can be realized through our realized map of geometric features.Accordingly,the designed achromatic microlenses with low-dispersion fused silica were fabricated using a focused ion beam,and precise surface profiles were obtained.The fabricated microlenses exhibited a high average focusing efficiency of 65%at visible wavelengths of 410-680 nm and excellent achromatic capability via white light imaging.Moreover,the design exhibited the advantages of being polarization-insensitive and near-diffraction-limited.These results demonstrate the effectiveness of our proposed achromatic microlens design approach,which expands the prospects of miniaturized optics such as virtual and augmented reality,ultracompact microscopes,and biological endoscopy.
基金
supported by grants from the National Key Research and Development Program of China(2022YFB3806000)
the National Natural Science Foundation of China(52325208 and 11974203)
the Beijing Municipal Science and Technology Project(Z191100004819002).
