摘要
双光子聚合光刻技术和光子晶体的研究相辅相成。本文首先简述了三维光子晶体的概念及其典型结构以及双光子聚合光刻技术的原理与特点;然后回顾了双光子聚合光刻技术打印三维光子晶体在分辨率、打印速度和材料扩展等方面的研究进展,并重点介绍了三维光子晶体在光学领域的应用情况;最后总结了双光子聚合光刻在制备三维光子晶体方面存在的一些问题,并对其在未来的研究方向进行了展望。
Significance Investigations pertaining to two-photon polymerization lithography(TPL)and photonic crystals are mutually reinforcing.This review first outlines the concept and typical structures of three-dimensional(3D)photonic crystals,as well as the principles and characteristics of TPL technology.Subsequently,research progress pertaining to the utilization of TPL for printing 3D photonic crystals is introduced,with emphasis on aspects such as resolution,printing speed,and the extension of material library.Additionally,the potential applications of 3D photonic crystals in the field of optics are highlighted.Finally,the existing challenges in the TPL printing of 3D photonic crystals are discussed,and the prospective future research directions are presented.Progress The rapid evolution of information technology imposes continuous demands on information transfer speed,the energy consumption of devices,and anti-interference performance.In this context,photons,which serve as information carrier,exhibit greater capability in terms of information processing compared with electrons.Photonic crystals,which are recognized as quintessential structures for manipulating photons,have garnered substantial research interest.The periodic arrangement of materials with varying refractive indices in photonic crystals results in advanced optical modes,including photonic band gaps and slow light modes(Fig.1).The conceptualization of photonic crystals has significantly advanced investigations into micro/nano optics and optical devices,thus promoting the development of optical communication,information displays,and integrated photonics.Optical components fabricated using one-and two-dimensional photonic crystals have been investigated comprehensively and applied extensively.However,the effective utilization of 3D photonic crystals,which are characterized by periodic structures in all three orthogonal directions,remains hindered by limitations in micro/nano manufacturing technology.The creation of 3D photonic crystals with attributes suc
作者
赵晗彤
苏思华
李琛
周明霞
张泽政
张晨
阮琦锋
宋清海
Zhao Hantong;Su Sihua;Li Chen;Zhou Mingxia;Zhang Zezheng;Zhang Chen;Ruan Qifeng;Song Qinghai(Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System,Harbin Institute of Technology(Shenzhen),Shenzhen 518055,Guangdong,China;Guangdong Provincial Key Laboratory of Semiconductor Optoelectronic Materials and Intelligent Photonic Systems,Harbin Institute of Technology(Shenzhen),Shenzhen 518055,Guangdong,China;Pengcheng Laboratory,Shenzhen 518055,Guangdong,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2024年第12期178-190,共13页
Chinese Journal of Lasers
基金
国家自然科学基金重点项目(12334016、12261131500、92250302、12304415)
广东省自然科学基金-面上项目(2023A1515012912)
深圳市基础研究项目(GXWD20231130123107001)
哈尔滨工业大学校科研启动经费资助项目(HA45001138)。
关键词
激光技术
3D打印
光子晶体
双光子聚合
laser technology
3D printing
photonic crystal
two-photon polymerization
