摘要
电容传感器是实现空间任务中高精度位移探测的关键部件,受到敏感结构加工误差以及电子学器件精度的影响,系统电路的实际增益往往与理论之间存在一定差异.本文以差分放大电路为核心,对电容传感电路各环节的理论模型进行分析,并在此基础上构建了其增益及零偏模型.同时结合敏感结构工程样机开展了相关的标定实验,实现了多自由度上位移到电压的精确高效标定.此外,还提出了一种与之相对应的调制标定方法,能够有效地降低低频扰动造成的干扰,并通过实验验证了该标定方案的可行性以及零偏模型的准确性.结果显示,在未进行温控调节的情况下,各通路在多次测试下所得的标定增益系数的RMSPER值均小于0.2‰.
A capacitive sensor is a key component of high-precision displacement detection in space missions.However,due to the influence of sensitive structural manufacturing errors and electronics device precision,theoretical and actual system circuit gains often differ.Herein,as the core of the capacitive sensing circuit,the theoretical model of the differential amplifier circuit is analyzed.Considerably,a model of gain and zero bias of the circuit is proposed.Meanwhile,a corresponding modulation calibration method is applied using the sensitive structure engineering prototype to calibrate multiple degrees of freedom from displacement to voltage.Moreover,the calibration scheme feasibility and zero-bias model accuracy are experimentally verified.Results show that the RMSPER(Root Mean Square Percentage Error)value of the calibrated gain coefficient of each channel is<0.2‰ under multiple tests without temperature control.
作者
刘东旭
王少鑫
齐克奇
董鹏
郭纬川
贾建军
LIU DongXu;WANG ShaoXin;QI KeQi;DONG Peng;GUO WeiChuan;JIA JianJun(Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences(UCAS),Hangzhou 310024,China;Institute of Mechanics,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100049,China;Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201899,China;Shanghai Institute of Technical Physics of the Chinese Academy of Sciences,Shanghai 200083,China)
出处
《中国科学：物理学、力学、天文学》
CSCD
北大核心
2024年第7期137-147,共11页
Scientia Sinica Physica,Mechanica & Astronomica
基金
国家重点研发计划(编号:2020YFC2200104)资助项目。
关键词
电容传感
多自由度标定
敏感结构
零偏模型
capacitive sensing
multiple degrees of freedom calibration
sensitive structure
zero bias model
