摘要
开发了由高重复频率(3 kHz)高能量(3 mJ)钛蓝宝石激光器驱动的极紫外和软X射线高次谐波激光光源。该光源系统在30 nm(光子能量为~45 eV)波长附近实现了大于120μW的平均功率,在13.46 nm波长(光子能量为~92 eV)处实现了1.9μW的平均功率,其中在13.46 nm波长处带宽为0.124 nm的单个谐波实现了0.32μW的平均功率。此外,在该系统中,激光功率连续12 h的不稳定性均方根小于5%,连续8 h光束指向均方根小于10μrad。该系统在生物成像、干涉光刻和芯片检测等领域中具有重要应用。
Objective Short wavelength,short-pulse,and high-coherence laser sources are urgently needed for research on ultra-wide dynamics at the microscopic scale.Additionally,with the demand for an ever-increasing chip computing speed,the semiconductor field urgently requires small and low-cost extreme ultraviolet light sources for material development and wafer defect detection.Highorder harmonic(HHG)technology is used to realize laboratory desktop applications and produce high-coherence and high-resolution extreme ultraviolet(EUV)light sources,which is one of the most reliable technologies and is gradually becoming one of the most important tools for atomic,molecular,advanced quantum,and other materials research as well as nano-imaging.Based on the semiconductor field and experimental requirements,we build a set of HHG-EUV sources using a commercial Ti∶sapphire laser,which is a highly stable,high-power 13.5-nm source.This will advance research in material development,semiconductor performance characterization,biomedical imaging,wafer defect detection,and other fields of research.Methods High-order harmonic processes can be explained by the semiclassical three-step model,and several experiments have demonstrated that Ti∶sapphire lasers are among the best driving sources for generating an EUV source.Focused high-average-power laser pulses interacting with rare gases produce harmonics that cover the extreme ultraviolet(UV)and soft X-ray regions,thereby making them the most efficient source for electrodynamics studies.The reaction region is commonly characterized using nozzles,gas cells,and hollow waveguides.The latter has the highest harmonic conversion efficiency owing to the phase modulation process;however,it is difficult to calibrate and achieve a stable output over long periods.To achieve a high flux and stable output from a 13.5-nm harmonic source,we design and build a beam stabilization control system to assist the alignment process and maintain beam stability.In addition,we build a dual-optical and flat-field s
作者
李逵
孟润宇
李睿晅
张光银
姚铭杰
徐豪
王雨童
李捷
张晓世
樊仲维
Li Kui;Meng Runyu;Li Ruixuan;Zhang Guangyin;Yao Mingjie;Xu Hao;Wang Yutong;Li Jie;Zhang Xiaoshi;Fan Zhongwei(Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100094,China;School of Physics and Astronomy,Yunnan University,Kunming 650216,Yunnan,China;Yunnan Observatories,Chinese Academy of Sciences,Kunming 650216,Yunnan,China;School of Optoelectronics,University of Chinese Academy of Sciences,Beijing 100049,China;School of Instrumentation and Optoelectronic Engineering,Beihang University,Beijing 100191,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2024年第7期164-171,共8页
Chinese Journal of Lasers
基金
国家重点研发计划(2021YFB3602600)
国家自然科学基金青年科学基金(62005291)
中国科学院项目(GJJ⁃STD20200009)
北京市科学技术委员会项目(Z221100006722008)。
关键词
激光器
高次谐波
极紫外激光
13.5
nm光源
软X射线
飞秒激光
lasers
high-order harmonics
extreme ultraviolet laser
13.5 nm light source
soft X-rays
femtosecond laser
