摘要
多线摇摆往复式线锯切割加工是目前将蓝宝石晶棒切割成晶圆衬底的主要加工方法,加工过程中法向切割力是反映加工过程稳定性的重要指标。测量了多线摇摆往复式线锯切割蓝宝石晶棒过程中产生的法向力F_(n),跟踪了晶棒不同位置和不同切割深度下法向力的变化规律,以法向力变化幅值ΔF_(n)为指标,探究各种工艺参数对加工过程稳定性的影响。试验结果表明:法向力F_(n)与线锯的往复运动、工件的摇摆运动有明确的对应关系,晶棒前端的ΔF_(n)与中后端的有明显的不同。线速度V_(s)、最大摇摆角度θ_(max)、单片耗线量M_(d)、张紧力F_(w)、总切割时间T等工艺参数对ΔF_(n)有着不同的影响。ΔF_(n)的波动程度与线锯磨损有着密切的关系。
Multi-wire swing reciprocating sawing technology is the main machining method used to cut sapphire crys-tal bars into wafer substrates,while normal force is an important index that reflects the processing stability.In this pa-per,the normal force(F_(n))during multi-wire swing reciprocating wire saw cutting sapphire crystal bars was measured,and the change in normal force at different positions and cutting depths of the sapphire crystal bars was tracked.The in-fluence of various process parameters on the stability of the machining process was tracked by using the rangeability of normal force(ΔF_(n))as the index.The experimental results show that F_(n)is closely correlated with the reciprocating motion of the wire saw and the rocking motion of the workpiece,andΔF_(n)in the front of the sapphire crystal bar is significantly different from that in the middle and back.Process parameters such as the wire saw speed(V_(s)),maximum swing angle(θ_(max)),single piece wire consumption(M_(d)),tensioning force(F_(w)),and total cutting time(T)have different effects onΔ.The fluctuation degree ofΔF_(n)is closely related to the wear of the wire saw.
作者
刘亿圣
黄辉
王兰青
廖信江
LIU Yisheng;HUANG Hui;WANG Lanqing;LIAO Xinjiang(Institute of Manufacturing Engineering,Huaqiao University,Xiamen 361021,Fujian China;College of Mechanical Engineering and Automation,Huaqiao University,Xiamen 361021,Fujian China)
出处
《金刚石与磨料磨具工程》
CAS
北大核心
2024年第2期143-150,F0003,共9页
Diamond & Abrasives Engineering
基金
国家自然科学基金(U22A20198)
福建省自然科学基金(2022J05059)
教育部创新团队滚动计划(IRT_17R41)
福建省智能制造科技经济融合服务平台。
关键词
多线摇摆往复式线锯切割
蓝宝石
法向力
磨损
加工稳定性
multi-wire swing reciprocating sawing technology
sapphire
normal force
wear and tear
machining stability
