摘要
以碳酸镧铈为前驱体,HF酸、氟硅混酸为氟源氟化、高温焙烧、球磨的方法制备含氟铈基稀土抛光粉。采用X射线衍射、扫描电子显微镜、透射电子显微镜、粒度分析仪、激光共聚焦显微镜等检测手段对不同氟源铈基稀土抛光粉进行表征。结果表明,HF酸和氟硅混酸氟化后的铈基稀土抛光粉物相组成相同,均出现CeO_(2),LaOF和LaF_(3)衍射峰;氟化后两种抛光粉的形貌均发生明显变化,HF酸氟化后的抛光粉颗粒成型较好,一次颗粒平均粒径约113nm,氟硅混酸氟化后,出现球形颗粒,一次颗粒平均粒径约90nm,比HF酸氟化的铈基稀土抛光粉粒径小,球形度较好。HF酸和氟硅混酸氟化的铈基稀土抛光粉4次抛光的磨削率基本保持不变,抛光后的K9玻璃250μm×250μm表面粗糙度分别为84.54和81.85nm,两种抛光粉抛光后的表面粗糙度相差较小。
The fluorine-containing and cerium-based rare earth polishing powder was prepared with carbonate lanthanum cerium as precursor by the processes including fluorination of hydrofluoric acid and fluorosilicate mixed acid,high temperature calcination and ball milling.Performances of cerium-based rare earth polishing powders with different fluorine were characterized by X-ray diffraction,scanning electron microscope,transmission electron microscope particle,size analyzer,laser confocal microscope and other detection methods.The results show that the phase compositions of cerium-based rare earth polishing powders after fluorination with hydrofluoric acid and fluorosilicate mixed acid are the same,with CeO_(2) LaOF and LaF_(3)diffraction peaks appearing.After fluorination,the morphology of the two kinds of polishing powders changes significantly.The polishing powder particles after fluorination with hydrofluoric acid were well formed,and the average particle size of the primary particles is about 113 nm.Spherical particles appear after the fluorosilicate mixed acid fluoridation,and the average particle size of the primary particles is about 90 nm.Compared with the cerium-based rare earth polishing powder fluorinated by hydrofluoric acid,the particle size is smaller and the sphericity is better.The grinding rate of the cerium-based rare earth polishing powder fluorinated by hydrofluoric acid and fluorosilicate mixed acid remained basically unchanges for four times.The surface roughness of the polished K9 glass of 250μm×250μm is 84.54 and 81.85 nm,respectively.The difference of surface roughness between the two polishing powders is small.
作者
范娜
陈传东
于健飞
胡群
岳帅军
赵思远
刘杨
Fan Na;Chen Chuandong;Yu Jianfei;Hu Qun;Yue Shuaijun;Zhao Siyuan;Liu Yang(Baotou Research Institute of Rare Earths,National Engineering Research Centre of Rare Earth Metallurgy and Functional Materials,Baotou 014030,China)
出处
《中国稀土学报》
EI
CAS
CSCD
北大核心
2024年第2期261-267,I0003,共8页
Journal of the Chinese Society of Rare Earths
基金
内蒙古自治区科技重大专项项目(2019ZD023,2021ZD0028)
北方稀土科技项目(BFXT-2022-D-0021,BFXT-2021-D-0049,BFXT-2020-D-0025)资助。
关键词
HF酸
氟硅混酸
含氟抛光粉
抛光性能
hydrofluoric acid
fluorosilicate mixed acid
fluorinated polishing powder
polishing performanc
