摘要
尽管现有常用冷却技术可为微电子机械系统(Micro electro mechanical systems, MEMS)的散热提供解决方案,但实现电子设备的高效散热仍然是一个严峻挑战。与传统冷却技术相比,合成射流(Synthetic jet, SJ)是一种更加有效的散热技术,它为MEMS的散热提供了潜在解决途径。首先概述SJ的形成、发展及演变,在解释流场拓扑结构基础上对SJ传热特性进行研究,发现在驻点位置处SJ可获得最佳传热性能。然后深入分析影响SJ传热的腔体几何参数、激励器参数及流场参数,指出孔板间距是影响SJ冷却的关键因素。最后探讨基于SJ的微通道、翅片等多种新型散热器的散热性能,剖析实现微型化SJ冷却技术在SJ的特性变化规律、效率及噪声等方面存在的难点,为其未来发展提供探究方向。
Although the heat dissipation problem of MEMS can be solved by existing common cooling techniques,it is still a serious challenge to achieve the efficient heat dissipation of electronic equipment.Compared with the traditional cooling techniques,the synthetic jet is a more efficient cooling technology,which provides a potential solution for the heat dissipation of MEMS.Firstly,the formation,the development and evolution of SJ are summarized,and the heat transfer characteristics of SJ are studied on the basis of explaining the flow-field topology.It is found that the best heat transfer performance of SJ can be obtained at the stagnation region.Secondly,the geometrical parameters of the cavity,exciter parameters and flow-field parameters affecting the heat transfer characteristics of SJ are analyzed in depth,and it is pointed out that the orifice to heat target spacing is the key factor affecting the cooling of SJ.Finally,the heat dissipation performance of various new radiators such as microchannels and fins based on SJ is discussed,and the difficulties in realizing the miniaturization of SJ cooling technology in characteristics,efficiency and noise of SJ are also analyzed,which provides the research direction for its future development.
作者
张立军
刘世博
甘振威
徐嘉怡
杨宁
杨博涵
王杭
ZHANG Lijun;LIU Shibo;GAN Zhenwei;XU Jiayi;YANG Ning;YANG Bohan;WANG Hang(College of Mechanical and Electronic Engineering,China University of Petroleum,Qingdao 266580)
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2023年第24期164-176,共13页
Journal of Mechanical Engineering
基金
中央高校基本科研业务专项资助项目(17CX05021)。
关键词
合成射流
微电子机械系统
冷却技术
传热特性
散热应用
synthetic jet
micro electro mechanical system
cooling technique
heat transfer characteristics
cooling application
