摘要
随着航空装备技术的快速发展,MEMS呈高度智能化复杂化趋势,对MEMS的高质量需求日益增加,选择具有良好可靠性和稳定性的元器件是MEMS在方案论证阶段质量特性设计工作的重要目标。MEMS元器件组件级是MEMS的基础层级,其质量特性是实现系统功能性能与通用质量特性的基础和掌握分析MEMS总体质量水平的源头。文章从复杂MEMS元器件组件级多质量特性需求分析出发,结合MEMS元器件组件级结构特点,对元器件及组件材料失效机理及影响模式展开研究,探究MEMS元器件组件级各质量特性之间的关系桥梁,构建元器件组件级多质量特性一体化指标体系并提出基于综合评价的验证方法。
With the rapid development of aviation equipment technology,MEMS is showing a highly intelligent and complex trend,which increases the demand for high-quality MEMS.Choosing components with good reliability and stability is an important goal of MEMS quality characteristic design work in the scheme demonstration stage.The component level of MEMS components is the fundamental level of MEMS,and its quality characteristics are the foundation for achieving system functional performance and general quality characteristics,as well as the source for mastering and analyzing the overall quality level of MEMS.The article starts from the analysis of the multi quality characteristics requirements of complex MEMS components at the component level,and combines the structural characteristics of MEMS components at the component level to study the failure mechanism and impact mode of components and component materials.It explores the relationship bridge between the various quality characteristics of MEMS components at the component level,constructs an integrated indicator system for multi quality characteristics of components at the component level,and proposes a verification method based on comprehensive evaluation.
作者
汪莹
刘小方
茶正忠
寇玺
侯梦婷
张克剑
WANG Ying;LIU Xiaofang;CHA Zhengzhong;KOU Xi;HOU Mengting;ZHANG Kejian(Rocket Force University of Engineering,Xi'an 710000,China)
出处
《传感器世界》
2024年第1期1-6,共6页
Sensor World
