摘要
在某发动机试车试验过程中,需要小体积高温压力传感器来实现压力参数测量。文章主要介绍小体积高温纳米薄膜压力传感器的研究,通过改进纳米薄膜敏感材料的合金成分,设计耐高温电极引线焊盘,优化传感器敏感电阻设计,研制出小体积250℃高温纳米薄膜压力传感器,通过性能测试,传感器精度高、稳定性好、抗震能力强,可以满足发动机试车试验压力参数测量要求。
During a certain engine test drive,it is necessary to use a small-sized high-temperature pressure sensor to achieve pressure parameter measurement.The article primarily introduces the research on small-sized high-temperature nano thin-film pressure sensors.By improving the alloy composition of the nano thin-film sensitive material,designing high-temperature-resistant electrode wire bonding pad,and optimizing the design of sensor resistor,a small-sized 250°C high-temperature nano thin-film sensor has been developed.Through performance testing,the sensor exhibits high accuracy,excellent stability,and strong resistance to vibrations,meeting the pressure parameter measurement requirements for engine test drives.
作者
雷卫武
崔洪伟
韦冰峰
LEI Weiwu;CUI Hongwei;WEI Bingfeng(Beijing Zhong Hang Xing Sheng Measurement and Control Technology Limited Company,Beijing 102101,China;Beijing Institute of Structure and Environment Engineering,Beijing 100076,China)
出处
《传感器世界》
2023年第11期5-9,共5页
Sensor World
关键词
纳米薄膜
压力传感器
高温
nano thin film
pressure Sensor
high temperature
