摘要
难熔金属钨由于电子迁移抗力强、高温稳定性好以及电子发射系数高等优点,在半导体制造中被用于制备溅射薄膜材料的钨和钨合金靶材。微纳钨粉作为制造半导体用钨和钨合金靶材的重要原料,其性能影响半导体用钨和钨合金靶材的稳定性、薄膜沉积速率等性能,研究其合成方法具有重要的意义。综述了国内外微纳钨粉的合成方法,重点对氢还原法、碳氢还原法、高能球磨法、等离子体技术等在微纳钨粉合成领域的研究进行了综述,同时对酸沉淀法、循环氧化还原法、喷雾干燥法进行了简单的介绍,并对这些合成方法的优缺点进行了简单评述。在氢还原法中,突出介绍了不同种类钨原料在微纳钨粉合成中的应用;碳氢还原法中,重点介绍了添碳氢还原法和碳还原-氢还原两步还原法两种工艺路线,探究了C/WO3比对两种工艺路线结果的影响;高能球磨法中,总结了球磨介质、球料比、过程抑制剂等球磨参数对球磨效果的影响;等离子体技术介绍中,总结了现有的钨原料在微纳钨粉中的应用情况。
Tungsten is a kind of refractory rare metal element.It has the advantages of strong electron migration resistance,good high temperature stability and high electron emission coefficient.It has a wide range of applications in the semiconductor manufacturing process,such as being used as a sputtering coating material to make gate circuit electrodes,wiring metals and shielding metal materials,etc.Great progress has been made in the research of tungsten and tungsten alloy targets.The particle size of the raw tungsten powder affects the density of the sintered target.The tungsten powder is prepared by a series of molding methods to prepare tungsten and tungsten alloy targets.The higher the density of the target,the better the performance of the film.At the same time,the particle size of the raw tungsten powder affects the grain size of the target,and the grain size affects the sputtering effect of the target.Generally speaking,the tungsten target for semiconductor prepared by using micro-nano tungsten powder has high density,small grain size,fast film deposition rate of tungsten target,and excellent performance.Therefore,the preparation of small-sized micro-nano tungsten powder is the key to research and manufacture high-quality tungsten targets.The current synthesis methods of micro-nano tungsten powder mainly include hydrogen reduction method,high-energy ball milling method,plasma technology and so on.The hydrogen reduction method is currently the most widely used and mature method for preparing tungsten powder.Starting from these methods,this paper will review and introduce the research on the synthesis process of micro-nano tungsten powder.This article summarized the synthesis methods of micro-nano tungsten powder at home and abroad,focusing on the research of hydrogen reduction method,hydrocarbon reduction method,high-energy ball milling method and plasma technology.Meanwhile,some relatively important methods would be highlighted in this paper,such as the acid precipitation method,cyclic oxidation reduction method
作者
顾晓倩
滕海涛
曲鹏
丁照崇
贾倩
吕保国
Gu Xiaoqian;Teng Haitao;Qu Peng;Ding Zhaochong;Jia Qian;Lv Baoguo(National Engineering Research Center for Rare Earth Materials,GRINM Group Co.,Ltd.,Beijing 100088,China;Grikin Advanced Materials Co.,Ltd.,Beijing 102200,China;Beijing General Research Institute for Nonferrous Metals,Beijing 100088,China)
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2023年第10期1427-1436,共10页
Chinese Journal of Rare Metals
基金
国家重点研发计划重点基础材料技术提升与产业化专项(2017YFB0305603)资助。
关键词
微纳钨粉
氢还原法
高能球磨法
等离子体技术
micro-nano tungsten powder
hydrogen reduction
high-energy ball milling
plasma technology
