摘要
光栅是一种常见的光谱元件,在光谱物质检测领域有着重要的应用。由于传统机械光栅的光栅间距固定,物质吸收光栅衍射光的波长单一,因此对吸收光谱带较宽的物质检测效果不明显。柔性光栅在外界激励下光栅间距可调,衍射光波长可实时变化,适应于宽光谱带物质检测。为确定任意时刻柔性光栅在激励作用下的间距数据,文章根据工业废气中硫化氢和一氧化碳在近红外处的光谱特性,设计并制作了柔性光栅,并对光栅进行了仿真分析。采用机器视觉的方案来测量光栅间距,利用激光驱动柔性光栅的方案完成光栅栅距标定。采用非接触式光栅衍射法建立光栅间距标定系统,用CCD相机采样,用LabVIEW软件进行畸变校正,设置标定信息,实现光栅间距测量。通过对标定板的误差分析,光栅间距测量精度可以达到8‰。分析结果表明,该系统抗干扰能力强,测量稳定性好,测量精度高。最后用激光器作为驱动源,实现光栅间距的连续性变化,完成标定。
Grating is a common spectral element,which has an important application in the field of material detection by spectrum.Because the grating spacing of traditional mechanical grating is fixed,and the diffraction wavelength of material absorption grating is single,the detection effect on materials with wide absorption spectrum band is not obvious.The distance between flexible gratings can be adjusted under external excitation,and the wavelength of diffracted light can be changed in real time,which is suitable for the detection of substances with wide spectral band.In order to determine the distance data of flexible grating under excitation,a flexible grating is designed and manufactured according to the spectral characteristics of hydrogen sulfide and carbon monoxide in industrial waste gas in near infrared,and the grating is simulated and analyzed.The grating spacing is measured by machine vision,and the flexible grating is driven by laser to change the grating spacing,thus realizing the grating spacing calibration.Non-contact grating diffraction method is used to establish grating spacing calibration system,CCD camera is used for sampling,LabVIEW software is used for distortion correction,and calibration information is set to realize grating spacing measurement.Through the error analysis of the calibration board,the measurement accuracy of grating spacing can reach 8‰.The analysis results show that the system has strong anti-interference ability,good measurement stability and high measurement accuracy.Finally,the laser is used as the driving source to realize the continuous change of grating spacing and complete the calibration.
作者
李炼
张周强
Li Lian;Zhang Zhouqiang(College of Mechanical and Electrical Engineering,Xi’an Polytechnic University,Xi’an 710600,China)
出处
《无线互联科技》
2023年第19期109-116,共8页
Wireless Internet Technology
基金
国家自然科学基金青年项目
项目编号:61701384。陕西省教育厅重点科学研究计划项目
项目编号:20JS051。
关键词
栅距标定
视觉测量
仿真分析
柔性光栅
光驱动
grid spacing calibration
visual measurement
simulation analysis
flexible grating
laser drive
