摘要
静态准确度是压电式压力传感器重要的技术指标之一。为准确评价压电式压力传感器的静态性能及试验方法,本文根据其工作原理,设计静态性能试验,并对影响因素进行验证。结果表明:方法正确性、幅频特性及下降时间一致性的试验数据满足指标要求,且采用的计算方式与静态压力传感器的相关标准及技术完全相同,能有效对测量上限60MPa以下、准确度等级0.1级及以下的压电式压力传感器进行静态性能评价。
Static accuracy is one of the important technical indexes of piezoelectric pressure sensor.In order to accurately evaluate the static performance and test method of piezoelectric pressure sensor,the static performance test is designed according to its working principle,and the influencing factors are verified.The results show that the accuracy of the method,the amplitude-frequency characteristics and the consistency of the drop time test data meet the requirements of the indicators,and the calculation method adopted is exactly the same as the relevant standards and technologies of static pressure sensors,which can effectively evaluate the static performance of piezoelectric pressure sensors with the measurement upper limit below 60MPa and the accuracy level below 0.1.
作者
郝罗亮
甘蓉
汪帅
王彭
刘莎
HAO LuoLiang;GAN Rong;WANG Shuai;WANG Peng;LIU Sha
出处
《计量与测试技术》
2023年第11期46-50,共5页
Metrology & Measurement Technique
基金
2022年度四川省重要技术标准研究项目(项目编号:ZYBZ2022-9)。
关键词
压电式压力传感器
静态性能
阶跃压力
幅频特性
下降时间
piezoelectric pressure sensor
static performance
step pressure
amplitude frequency characteristics
fall time
