摘要
电子回旋共振(Electron Cyclotron Resonance,ECR)等离子体源是用来产生单电荷态离子束的等离子体装置,它可以产生束流较强或者较高的电荷态离子,同时还能提供束流的稳定性、重复性和工作寿命。引出系统的设计对ECR等离子体源是至关重要的,引出系统对等离子体的引出束流有直接影响,良好的引出系统设计可以提高引出束流强度。采用有限元分析方法对ECR等离子体源引出系统进行分析与设计,得到了满足设计需求与目标的引出束流。
Electron cyclotron resonance(Electron Cyclotron Resonance,ECR)plasma source is used to generate single charged ion beam plasma device,it can produce strong or high charged ions,but also can provide beam stability,repeatability and working life.The design of the lead system is crucial to the ECR plasma source.The lead system has a direct impact on the lead beam of the plasma,and a good lead system design can improve the lead beam strength.The ECR plasma source lead system was analyzed and designed to meet the design requirements and objectives.
出处
《科技风》
2023年第31期68-70,共3页
基金
国家自然科学基金资助项目(E05KCI25591)。
