摘要
氦质谱检漏是真空检漏领域里不可缺少的一种技术,由于检漏效率高,简便易操作,仪器反应灵敏,精度高,不易受其他气体的干扰,在电阻炉检漏中得到了广泛应用。氦质谱检漏仪是根据质谱学原理,用氦气作示漏气体制成的气密性检测仪器,由离子源、分析器、收集器、冷阴极电离规组成的质谱室和抽气系统及电气部分等组成。目前在国内的氦质谱检漏领域中人工作业占了绝大部分位置,人工作业的效率相对要低下,难以满足市场日益增长的产品需求,企业要发展效率就要提高,自动化的运用可减少人工的付出提高效率,成为了现今社会发展的必然趋势。
Helium mass spectrometry leak detection is an indispensable technology in the field of vacuum leak detection.It has been widely used in resistance furnace leak detection because of its high leak detection efficiency,simple and easy operation,sensitive instrument response,high precision and easy to be interfered by other gases.Helium mass spectrum leak detector is a gas tight detection instrument based on the principle of mass spectrometry,which uses helium as a leak indication system.It is composed of ion source,analyzer,collector,cold cathode ionization gauge,mass spectrum chamber,extraction system and electrical part.At present,in the field of helium mass spectrometry leak detection in China,manual work accounts for the vast majority of positions,the efficiency of manual work is relatively low,it is difficult to meet the growing product demand in the market,enterprises must improve the development of efficiency,the use of automation can reduce the labor to improve efficiency,has become an inevitable trend of today's social development.
出处
《今日自动化》
2023年第6期37-39,共3页
Automation Today
