摘要
二合一管式PECVD是晶硅太阳能电池生产环节中用于制备氧化铝+氮化硅钝化减反射薄膜的常用机台,是提升电池光电转换效率不可或缺的工序,同时也是影响良率的重要工序。TMA(三甲基铝)作为氧化铝制备时的反应气体,其纯度以及杂质含量严重影响电池的光电转化效率、良率。经研究发现,TMA中Cl元素杂质含量过高,可能导致机台尾排粉末量大、喷气嘴堵塞等现象,最终影响电池效率。
Two in one tubular PECVD is a common machine used to prepare aluminum oxide+silicon nitride passivated antireflection film in the production process of crystalline silicon solar cells.This process is indispensable to improve the photoelectric conversion efficiency of cells and also an important process affecting the yield.TMA(trimethylaluminum)is the reaction gas in the preparation of alumina,and its purity and impurity content are particularly important to the photoelectric conversion efficiency,yield of the battery and the operating state of the machine.This paper focuses on the impact of High Cl impurity content in TMA on the process quality and the machine in the production process of two in one tubular PECVD,such as low photoelectric conversion efficiency of the production battery,large amount of powder at the end of the machine,and Clogged air nozzles.After the TMA manufacturer improved the preparation process to reduce the content of impurity Cl element,it was verified again in the production line,and the product quality and machine operation were normal,further Clarifying that the content of impurity Cl element in the preparation process of TMA needs to be strictly controlled.
作者
邵海娇
张永
王贵梅
张志敏
刘苗
SHAO Haijiao;ZHANG Yong;WANG Guimei;ZHANG Zhimin;LIU Miao(Jing Ao Solar Co.,Ltd.,Xingtai Hebei 055550)
出处
《中国科技纵横》
2023年第15期104-107,共4页
China Science & Technology Overview
