摘要
为实现物体表面轮廓高精度三维测量,提出一种视场、物距、测量范围均较大的远心光路测量系统。介绍了系统组成及光三角测量原理,论述了投影与成像双光路均与被测表面法线呈45°夹角的光路搭建方式可降低较大深度测量范围对成像物镜景深的要求;建立系统深度标定理论模型,获得CCD单位像素深度理论值为0.5544μm;计算出放大倍率、数值孔径等光路参数并完成光路搭建;通过实验对所搭建测量系统的分辨力、测量范围、光条最小宽度及其边缘质量进行分析。实验结果表明,投影条纹最长2 mm,最小线宽可达8.96μm,条纹边缘清晰平滑。系统成像畸变小,可实现1.62μm的光学分辨率及0.54μm的深度像素分辨率,工作距离65 mm,深度测量范围不低于140μm,具有良好的测量性能。
To achieve high-precision 3D measurement of surface profile of the object,a telecentric optical path measurement system with large field of view(FOV),object distance and measuring range was proposed.The composition of the system and the principle of optical triangulation were introduced,the construction of the optical path with the angle of 45°between the projection and double optical path and the normal line of the measured surface could reduce the requirement of depth of field of the imaging objective lens for large depth measurement range.The theoretical model of system depth calibration was established,and the theoretical value of CCD unit pixel depth was 0.5544μm.The magnification,numerical apertures and other optical parameters were calculated and the optical path was constructed.The resolution,measuring range,minimum width of light stripe and edge quality of the system were analyzed by experiments.The experimental results show that the longest projection stripe is 2 mm,the minimum line width is 8.96μm,and the stripe edge is clear and smooth.The imaging distortion of the system is small,and the optical resolution of 1.62μm and the depth pixel resolution of 0.54μm can be achieved.The object distance is 65 mm,the depth measurement range is no less than 140μm.The system has good measurement performances.
作者
何娜
王建华
商执亿
HE Na;WANG Jianhua;SHANG Zhiyi(College of Mechatronic Engineering,Xi'an Technological University,Xi'an 710021,China)
出处
《应用光学》
CAS
北大核心
2023年第5期1073-1079,共7页
Journal of Applied Optics
基金
国家自然科学基金(51975448)
省部(级)科研基金重点项目(2019zdzx0-02-02)。
关键词
高分辨率测量
微线结构光
系统设计
性能分析
high-resolution measurement
thin-line structured light
system design
performance analysis
