摘要
在预键合生产环节中,直线模组运动精度补偿主要用于解决由于工作台运行精度偏差造成的预键合误差,从而提高整机的键合精度。直线模组运动精度补偿是利用激光干涉仪的线性测长测量直线模组在全行程内的实际位置,再将实际位置偏差值通过补偿驱动器进行补偿设置,从而得到完全符合实际机构运行工况的运行数据。
In the process of pre-bonding,the motion precision compensation of linear module is mainly used to solve the bonding error caused by the movement precision deviation of the pre-bonding table,so as to improve the bonding precision of the whole machine.In this method,the linear length measurement of the laser interferometer is used to measure the actual position of the linear module in the whole travel,and then the actual position deviation value is compensated by driver.Thus,the running data which accords with the actual working condition of the mechanism is obtained.
作者
陈磊
仉振
张鹏
CHEN Lei;ZHANG Zhen;ZHANG Peng(CETC Fenghua Information Equipment Co.,Ltd.,Taiyuan 030024,China)
出处
《电子工业专用设备》
2023年第4期38-41,共4页
Equipment for Electronic Products Manufacturing
关键词
直线模组运动精度补偿
激光干涉仪
线性测长
驱动器设置补偿
Motion accuracy compensation of linear module
Laser Interferometer
Linear length measurement
Compensation of driver settings
