摘要
高温薄膜传感器广泛应用在航空航天热端部件的参数测量方面,制备出具有良好性能的高温绝缘层是研制高温薄膜传感器的关键技术之一。基于电射流沉积技术,通过测定溶液参数和对制备出的Al_(2)O_(3)绝缘薄膜进行表征分析,探究了Al_(2)O_(3)混合液中溶胶与纳米悬浮液比例从1∶0.5逐步升至1∶1.5时,所制备的Al_(2)O_(3)高温绝缘层性能的变化。结果表明:用该方法制备的Al_(2)O_(3)薄膜在1 200℃高温下仍具有100 kΩ以上的电阻值,满足了高温薄膜传感器对高温绝缘层的要求,并且随着混合液中纳米悬浮液比例的提高,所制备出的Al_(2)O_(3)薄膜的性能呈现下降趋势。
High temperature thin film sensor is widely used in the parameter measurement of aerospace hot end components.The preparation of high temperature insulating layer with good performance is one of the key technologies in the development of high temperature thin film sensor.Based on the electrojet deposition technology,through the determination of the solution parameters and the characterization analysis of the prepared alumina insulating film,the alumina high temperature insulation layer performance changes were explored when the proportion of sol and nano-suspension in the alumina mixture increased from 1∶0.5 to 1∶1.5.The results show that the alumina film prepared by this method still has a resistance value of more than 100 kΩ at 1 200 ℃,which meets the requirement of high temperature film sensor for high temperature insulating layer.With the increase of the proportion of nano-suspension in the mixture,the performance of the alumina film prepared shows a tendency to decline.
作者
周浩
刘志春
王碧玲
侯振琪
孙宏毅
李强
赵鑫
梁军生
ZHOU Hao;LIU Zhichun;WANG Biing;HOU Zhenqi;SUN Hongyi;LI Qiang;ZHAO Xin;LIANG Junsheng(Dalian University of Technology,Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian 116024,China;Key Laboratory of Hypersonic Aerodynamic Force and Heat Technology,AVIC Aerodynamics Research Institute,Shenyang 110034,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2023年第7期22-27,32,共7页
Instrument Technique and Sensor
基金
航空科学基金项目(2019ZD063001)
国家自然科学基金项目(51675085)。
