摘要
金镀层具有良好的耐腐蚀性、抗氧化性、导电性及延展性,广泛应用于精密微纳元器件制造。电化学镀金是实现微纳元器件镀金的主要工艺之一,主要分为直流镀金工艺和脉冲镀金工艺。相较于直流镀金工艺,脉冲镀金工艺可通过控制脉冲波形、频率、占空比及电流密度等脉冲参数,改变金属离子电沉积过程中的电化学极化和浓差极化,灵活调控镀层的物理化学性能。近年来,国内外在微纳元器件脉冲镀金工艺领域开展了系列研究工作,并取得了不错的进展。综述了电化学脉冲镀金的基本原理,描述了电镀金试验中金由离子形态转化为金属的过程。此外,还综述了占空比、频率、电流密度、脉冲导通时间、脉冲关断时间等脉冲参数对金镀层形成的影响,以及镀层性能评价方式;另外,介绍了无氰和有氰两大典型镀液获得金镀层的基本情况,分析了它们各自的优缺点,主要表现为有氰镀液稳定性好,所得金镀层较均匀,而无氰镀液的突出优势为无毒,但其稳定性有待进一步提高。最后,展望了脉冲镀金工艺的发展方向,可为发展新型脉冲镀金工艺及应用拓展提供有益的参考和启示。
As a precious metal,gold has stable physical and chemical properties and wide range of applications in industrial and military fields.Therefore,the gold plating layer has good corrosion resistance,oxidation resistance,elec-trical conductivity and ductility,which is widely used in the manufacturing of precision micro-and nano-components.At present,electrochemical plating is one of the main processes for the realization of gold plating on micro-and nano-components.On the basis of potential or current applying mode,the electrochemical plating can be mainly divided into direct current plating process and pulse plating process.Compared with the direct current plating process,pulse plating process can regulate the electrochemical and concentration polarization of metal ions during electrodeposition process by controlling several pulse parameters,such as pulse waveform,frequency,duty cycle and current density.As a result,the physical and chemical properties of gold plating layer on micro-and nano-components can be flexibly adjusted during the pulse plating process.In the past years,a series of research works have been carried out and reported in the field of pulse gold plating for the manufacturing of micro-and nano-components.Among them,some of impressive progresses in the pulse gold plating process have been achieved.It is necessary to summarize the recent advancements in pulse gold plating process to guide future research.In this review,the basic principle of electrochemical pulse electroplating was introduced,and the process of gold transformation from ionic form to metal in gold electroplating experiment was described emphatically.The effect of pulse parameters(such as duty cycle,frequency,current density,turn on-time,turn off-time)on the formation of gold nucleus and gold plating layer was presented.In addition,some of commonly used methods for the evaluation of gold plating layer performance on micro-and nano-components(such as internal stress testing,crystal structure detection,micromorphology and surface roughn
作者
乔正阳
李江
刘贲
刘小天
康鑫
柯改利
何辉超
QIAO Zheng-yang;LI Jiang;LIU Ben;LIU Xiao-tian;KANG Xin;KE Gai-li;HE Hui-chao(Guizhou Space Appliance Co.,Ltd.,Guiyang 550009,China;China Academy of Space Technology,Beijing 100094,China;School of Materials Science and Engineering,Southwest University of Science and Technology,Sichuan Mianyang 621010,China;Institute of Environmental Energy Materials and Intelligent Devices,School of Metallurgy and Materials Engineering,Chongqing University of Science and Technology,Chongqing 401331,China)
出处
《表面技术》
EI
CAS
CSCD
北大核心
2023年第7期92-102,共11页
Surface Technology
基金
中央军委装备发展部全军共用信息系统装备预研(专用技术)项目(31512040302-3)
航天江南集团有限公司科技委创新课题(G-A318-CG-2022-0065)
重庆科技学院科研项目(ckrc2022003)。
关键词
金镀层
脉冲镀金
脉冲参数
基本原理
镀液
gold plating layer
pulse gold plating
pulse parameters
basic principle
plating solution
