摘要
采用预置散斑的X射线强度关联成像系统需要采集大量的散斑场,成像时间较长,而单幅散斑场信噪比低,难以单独用于图像重构。然而单幅散斑场中的空间分布信息包含一定的样品结构信息,可以用于样品缺陷快速检测。基于此,提出一种基于单幅预置散斑的缺陷检测方法,该方法将待检测样品探测散斑场与标准样品模拟散斑场的相关性作为样品缺陷的评价标准。同时基于该方法模拟X射线强度涨落二阶自关联检测光路,分析不同信噪比下探测散斑场分布的图像对比度对相关系数的影响。并对比多种细节增强方法,提高检测可靠性。最终结果表明,基于单幅散斑场的方法可以有效地进行样品的快速缺陷检测。
Objective X-ray is a powerful tool to analyze the internal structure of macroscopic objects and has been widely used in many fields,such as biomolecular imaging and micro/nanostructure detection.Traditional X-ray analysis techniques often have high requirements for light flux and coherence,which are difficult to be applied in a table-top source and thus limit their application.X-ray Fourier-transform ghost imaging(XFGI)has a low requirement for spatial coherence and enables table-top X-ray microscopic detection and imaging.In recent years,researchers have focused on spatial multiplexing,nonlocal modulation,preset speckle field,and other aspects in the field of XFGI,and it is shown that high-quality imaging can be achieved by using preset speckle patterns at low flux.XFGI via preset speckle patterns needs to measure a mass of speckle fields,and imaging consumes time.A single speckle field has a low signal-to-noise ratio and cannot be used to retrieve the image independently.However,certain sample structure information can be extracted from the spatial distribution of the single speckle field,which can be employed to realize rapid sample defect detection.We aim to propose a method for sample defect detection by using a single speckle pattern,which will be helpful for micro/nanostructure detection and analysis.Methods In this paper,a defect detection method based on speckle field distribution by single detection is proposed,and the correlation coefficient between the detected speckle field distribution of test samples and standard samples is used as the evaluation function for sample defect detection.The second-order autocorrelation detection of intensity fluctuation is simulated with the energy of 1095 eV,and defect detection samples have two types:samples with ten holes and circuit samples.Since experimental noise,such as shot noise,can affect the image contrast of the speckle field,the effect of speckle contrast is analyzed under different signal-to-noise ratios.To improve the reliability of this defect detection
作者
杨海瑞
谈志杰
喻虹
潘雪娟
韩申生
Yang Hairui;Tan Zhijie;Yu Hong;Pan Xuejuan;Han Shensheng(Key Laboratory for Quantum Optics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China;Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,Zhejiang,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2023年第10期293-300,共8页
Acta Optica Sinica
基金
国家自然科学基金(11627811)。
关键词
X射线光学
图像增强
散斑自关联
缺陷检测
引导滤波
X-ray optics
image enhancement
speckle autocorrelation
defect detection
guided image filtering
