摘要
设计良好的光学谐振腔是提高超导转变边沿传感器(TES)光学效率的有效手段,光学谐振腔结构厚度的变化,不仅对TES的光学效率有影响,而且会产生不同的残余应力进而影响TES的超导特性。研究了以超导Ti膜为TES功能层材料,同时选用SiO_(2)-SiN_(x)体系作为光学谐振腔薄膜。通过对数值仿真,确定了SiO_(2)-SiN_(x)体系光学谐振腔薄膜厚度变化对Ti-TES光学吸收效率的影响。分析了SiO_(2)-SiN_(x)体系光学谐振腔不同薄膜厚度的变化自身应力随之变化的趋势,最后制备了不同厚度SiO_(2)-SiN_(x)光学谐振腔的TES,并进行光学吸收效率的测试,验证了SiO_(2)-SiN_(x)体系光学谐振腔薄膜厚度对Ti-TES光学吸收效率变化的规律。
Well-designed optical cavity is an effective method to improve the optical efficiency of superconducting transition edge sensor(TES).Changes in the multi-layer films thickness of the optical cavity affect not only the optical efficiency but also the superconducting performance of TES due to the changes in film s stress.The Ti film is selected as the superconducting material of the TES functional layer due to its excellent characteristics at low temperature.Also,the SiO_(2)-SiN_(x)system is selected as the optical cavity film.Through the numerical simulation of the film thickness,the influence of the thickness of the SiO_(2)-SiN_(x)system optical resonator film on the optical absorption efficiency of Ti-TES is determined.Analyzed the tendency of the stress of the SiO_(2)-SiN_(x)system optical resonator with different film thicknesses,and finally prepared TES with different thicknesses of the SiO_(2)-SiN_(x)optical resonator,and tested the optical absorption efficiency to verify the SiO_(2)-SiN_(x)The influence of the film thickness of the system optical resonator on the Ti-TES optical absorption efficiency.
作者
刘海燕
孙潇莹
李劲劲
王雪深
陈建
高鹤
周哲海
徐骁龙
LIU Hai-yan;SUN Xiao-ying;LI Jing-jing;WANG Xue-shen;CHEN Jian;GAO He;ZHOU Zhe-hai;XU Xiao-long(Beijing Information Science and Technology University,Beijing 100192,China;National Institute of Metrology,Beijing 100029,China;Shenyang University of Chemical Technology,Shenyang,Liaoning 110142,China)
出处
《计量学报》
CSCD
北大核心
2023年第4期549-554,共6页
Acta Metrologica Sinica
基金
国家自然科学基金青年科学基金(61901432,61701470)
国家市场监督管理总局科技计划(2020MK153,2019MK112)
中国计量科学研究院基本科研业务费重点领域项目(AKYZD1903)
北京长城学者支持计划(CIT&TCD20190323)
北京青年拔尖人才支持计划(Z2019042)。
