摘要
针对目前分压型氧传感器响应时间长、功耗高、精度低的问题,提出了一种分压型氧传感器加热器热处理方法,将铁铬镍加热丝固溶处理1 200℃并时效处理900℃保温12 h,获得加热性能稳定的加热器,制备一种分压型氧传感器。传感器在10~300 kPa氧气压力下,可在7 s内实现快速响应,功耗小于8 W,精度优于±0.5 kPa。结果表明:采用本文研究的加热器热处理方法的分压型传感器信号输出值与氧气压力间存在良好的线性关系,具有在较宽氧气压力范围内实现高精度、低功耗、快响应的稳定性能。
Aiming at the problems of long response time,high power consumption and low precision that partial pressure type oxygen sensor has,a heat treatment method of partial pressure type oxygen sensor heater is proposed,Solution treatment of Fe-Cr-Ni heating wire at 1200℃and aging treatment at 900℃for 12 hours.A heater with stable heating performance is obtained and a partial pressure type oxygen sensor is prepared.Under the oxygen pressure of 10~300 kPa,the sensor can achieve fast response within 7 s,the power consumption is less than 8W,and the precision is better than±0.5 kPa.The results show that there is a good linear relationship between the signal output value of the partial pressure type sensor and the oxygen pressure using the heater heat treatment method studied in this paper,and it has a stable performance of achieving high precision,low power consumption and fast response in a wide range of oxygen pressure.
作者
王超
程振乾
马丽娜
孙略升
刘洋
刘玺
WANG Chao;CHENG Zhenqian;MA Lina;SUN Luesheng;LIU Yang;LIU Xi(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)
出处
《传感器与微系统》
CSCD
北大核心
2023年第5期57-60,共4页
Transducer and Microsystem Technologies
关键词
氧传感器
分压型
加热器
热处理方法
oxygen sensor
partial pressure type
heater
heat treatment method
