摘要
阐述通过对静态真空液氮管道系统的改进,避免管道夹层漏放气速率增加导致表面结露、结冰后产生的凝结水滴落,造成低温测试机器损坏的风险,解决排气不通畅造成低温不稳定的问题,对芯片低温测试领域液氮输送系统提供有效方案。
This paper expounds the improvement of the static vacuum liquid nitrogen pipeline system to avoid the increase in the leakage rate of the pipeline interlayer,which can cause condensation water droplets on the surface and cause damage to the low-temperature testing machine.It solves the problem of low temperature instability caused by unobstructed exhaust,and provides an effective solution for the liquid nitrogen transportation system in the field of low-temperature testing of core chips.
作者
蒋晨瑜
JIANG Chenyu(Unimos Microelectronics(Shanghai)Co.,Ltd.,Shanghai 201799,China)
出处
《集成电路应用》
2023年第4期38-40,共3页
Application of IC
关键词
集成电路测试
存储芯片
低温测试
液氮输送
真空管道
静态真空
排气
integrated circuit testing
storage chip
low-temperature testing
liquid nitrogen delivery
vacuum pipeline
static vacuum
exhaust
