摘要
阐述光刻设备中的大型精密设备运输减振需求,设计了基于钢丝绳弹簧并联结构的运输减振方案,可以满足运输过程中冲击<5g减振需求。探讨钢丝绳并联结构的动力学特性,获得不同参数下系统的减振特性,针对运输减振方案中的结构进行强度仿真,给出某设备运输过程的实测结果。
This paper describes the transportation vibration reduction requirements of large precision equipment in lithography equipment, and designs a transportation vibration reduction scheme based on the parallel structure of wire rope springs, which can meet the vibration reduction requirements of impact<5g during transportation. It discusses the dynamic characteristics of the wire rope parallel structure, obtains the vibration reduction characteristics of the system under different parameters, carries out strength simulation for the structure in the transportation vibration reduction scheme, and gives the measured results of the transportation process of a certain equipment.
作者
宋兴龙
SONG Xinglong(Shanghai Microelectronics Equipment(Group)Co.,Ltd.,Shanghai 201203,China)
出处
《集成电路应用》
2023年第2期303-305,共3页
Application of IC
关键词
光刻设备
大型精密设备
钢丝绳并联
减振系统
lithography equipment
large precision equipment
wire rope parallel connection
vibration reduction system
