摘要
针对音圈电机驱动柔性微定位平台的低阻尼谐振问题,利用零极点配置的根轨迹校正方法对其谐振振动模态进行有效抑制以满足其跟踪精度高、响应速度快、抗干扰能力强的性能要求。首先,搭建了音圈电机驱动柔性微定位平台系统并进行系统辨识,获得平台的动态特性;其次,为改善系统的响应特性,在原系统根轨迹上加入共轭零点消除低阻尼共轭极点带来的振荡;此外,在闭环系统基础上加入前置的相位超前前馈控制器以消除闭环系统的相位误差;最后,利用所设计控制器对频率为1 Hz、2 Hz、5 Hz的正弦信号和三角波信号进行跟踪实验,最大跟踪误差分别为轨迹幅值的7.08%和6.05%。实验结果表明,系统能够较好的复现所跟踪的信号,跟踪误差得到了较好的抑制,证明了所设计控制器的准确性、有效性。
Aiming at the low damping resonance problem of flexure micro/nano positioning stage driven by voice coil motor,this paper uses the root locus correction method of zero pole placement to effectively suppress its resonant vibration mode,so as to meet the performance requirements of high tracking accuracy,fast response speed and strong anti-interference ability.Firstly,the experimental system of flexure micro-positioning stage driven by voice coil motor is built,and the system identification is carried out to obtain the dynamic characteristics of the stage.Then,in order to improve the response characteristics of the system,conjugate zeros are added to the root locus of the original system to eliminate the oscillation caused by the low damping conjugate poles.In addition,a phase advance feedforward controller is added to closed-loop system to eliminate the phase error of the closed-loop system.Finally,the designed controller is used to track sinusoidal and triangular signals with frequencies of 1 Hz,2 Hz and 5 Hz.The maximum tracking errors are 7.08%and 6.05%of the track amplitude,respectively.The experimental results show that the system can better reproduce the tracked signal and suppress the tracking error,which proves the effectiveness and accuracy of the designed controller.
作者
陈云壮
赖磊捷
CHEN Yun-zhuang;LAI Lei-jie(School of Mechanical and Automotive Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)
出处
《组合机床与自动化加工技术》
北大核心
2023年第4期63-66,共4页
Modular Machine Tool & Automatic Manufacturing Technique
基金
上海自然科学基金资助项目(21ZR1426000)。
关键词
微纳米定位平台
音圈电机
零极点对消
相位超前控制器
micro-positioning stage
voice coil motor
zero pole cancellation
phase advance controller
