摘要
为了提高光纤湿度传感器的灵敏度,提出了一种基于并联光纤法布里-珀罗干涉仪(Fabry-Perot interferometers, FPIs)游标效应的增敏型湿度传感器,并进行了实验验证。该传感器由两个基于内径4μm石英毛细管的光纤FPI通过2×2耦合器并联组成,其中一个FPI作为传感FPI,其末端镀有湿敏特性的琼脂糖薄膜,另一个作为参考FPI。论文分析了器件的湿度传感工作原理,实验结果论证了该理论分析的正确性。实验显示,并联FPI游标效应器件在40%RH—60%RH范围内其灵敏度高达0.843 9 nm/%RH,较之单一FPI的灵敏度提高了9倍,是并联FPI反射谱直接波谷追踪波长解调灵敏度的44倍。增加FPI末端湿敏膜厚度,其灵敏度进一步提高至1.12 nm/%RH。该传感器制备简单、尺寸小、灵敏度高,在湿度测试方面具有潜在的应用价值。
To attain high humidity sensitivity, a sensitivity-enhanced sensor based on parallel fiber Fabry-Perot interferometers(FPIs) with the Vernier effect is proposed and experimentally demonstrated.It is made up of two optical fiber FPIs, each of which is based on a short capillary section with an inner diameter of 4 μm.A 2×2 coupler connects the two FPIs in parallel. The sensing element is one FPI covered with humidity-sensitive agarose film at its end face, whereas the reference element is the other.The theoretical study of the sensor′s operating principle and the experimental findings are in good agreement. Within the range of 40%RH—60%RH, high sensitivity of 0.843 9 nm/% RH is achieved.It is 44 times more sensitive than the direct tracing of a specific resonance dip in the superimposed reflection spectrum and is 9 times more sensitive than a single FPI.The thickness of the humidity-sensitive film is then increased, significantly improving the humidity sensitivity up to 1.12 nm/% RH.The easy fabrication, compact size, and high sensitivity of the proposed sensor indicate that it has a promising future in humidity detection.
作者
马行超
张熙梓
郭允
吴玉纯
王东宁
徐贲
MA Xingchao;ZHANG Xizi;GUO Yun;WU Yuchun;WANG Dongning;XU Ben(College of Optical and Electronic Technology,China Jiliang University,Hangzhou,Zhejiang 310018,China)
出处
《光电子．激光》
CAS
CSCD
北大核心
2023年第2期113-119,共7页
Journal of Optoelectronics·Laser
基金
浙江省自然科学基金(LY19F050010)
微光机电系统技术教育部重点实验室(天津大学)开放基金(MOMST 2016-1)资助项目。
