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石墨烯/硅基异质集成光电子器件

Integrated Optoelectronic Devices Based on the Hybrid Integration of Silicon and Graphene
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摘要 石墨烯/硅基异质集成的光子器件研究在近年来取得了巨大进展,因石墨烯所具有的诸多独特的物理性质如超高载流子迁移率、超高非线性系数等,石墨烯/硅基异质集成器件展现出了诸如超大带宽、超低功耗等优异性能。文章介绍了近年来报道的典型石墨烯/硅基异质集成器件,包括石墨烯/硅基电光调制器、石墨烯/硅基热光调制器和石墨烯/硅基光电探测器,简要阐述了其原理与性能,并对其未来的应用与发展做出了展望。 The research on graphene/silicon-based hetero-integrated photonic devices has made great progress in recent years.The graphene/silicon-based heterogeneous integrated devices have shown excellent performance such as ultra-large bandwidth and ultra-low power consumption thanks to the unique physical properties of graphene,such as ultra-high carrier mobility and ultra-high nonlinear coefficient.In this work,we reviewed the typical graphene/silicon-based heterogeneous integrated devices reported in recent years,including graphene/silicon-based electro-optical modulators,graphene/silicon-based thermo-optical modulators and graphene/silicon-based photodetectors,briefly described their principles and properties,and made a prospect for their future applications and development.
作者 彭文怡 严思琦 唐明 PENG Wenyi;YAN Siqi;TANG Ming(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,CHN)
出处 《半导体光电》 CAS 北大核心 2022年第6期1020-1028,共9页 Semiconductor Optoelectronics
关键词 硅基异质集成光子器件 石墨烯 调制器 探测器 silicon-based integrated photonic device graphene modulator photodetector
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