摘要
针对柔性压力传感器中刚性导电材料和柔性基材之间结合界面较弱,易出现开裂和脱落的问题,通过将导电材料嵌入聚合物表面,实现了两者的稳定连接,并制备了具有微观结构的聚二甲基硅氧烷(PDMS)柔性导电薄膜,然后通过面对面组装的方式完成了柔性压力传感器的制备。结果表明:表面嵌入导电材料的柔性薄膜性能稳定,在多次试验后,未出现裂纹或脱落的现象;与文献中报道的常规方法相比,具有工艺简单,结合界面稳定的优点。制备的柔性压力传感器在0~1 kPa范围内,具有高灵敏度(0.34 kPa^(-1))和快速响应(<200 ms),可准确检测到手指触摸时的微小压力。因此有望应用于柔性机器人触觉和人机交互界面等领域。
Aiming at the problem that the combination interface between rigid conductive material and flexible substrate in flexible pressure sensor is weak,resulting conductor crack and fall off,the conductive material is embedded into the polymer surface to realize the stable connection between the two materials.The PDMS flexible conductive thin film with microstructure face is prepared for the flexible pressure sensor assembled with two films face-to-face.The results show that the performance of the flexible film embedded with conductive materials is stable,no crack nor peeling off after many tests.Compared with the conventional methods reported in the literatures,the flexible pressure sensor film has the advantages of simple process and stable interface.It has high sensitivity(0.34 kPa^(-1))in the range of 0~1 kPa and fast response(less than 200 ms),and can respond to small pressure changes from touches by fingers.Therefore this assembled flexible sensor can address the needs of flexible robot touch sensing and human-computer interaction interface.
作者
杨云鹏
张婕
YANG Yunpeng;ZHANG Jie(School of Mechanical Engineering,Jiangnan University,Wuxi 214122,China)
出处
《传感器与微系统》
CSCD
北大核心
2023年第2期64-67,79,共5页
Transducer and Microsystem Technologies
基金
中央高校基本科研基金资助项目(JUSRP11946)
江苏省产业前瞻与共性关键技术(BF2017069)。
