摘要
针对拼接型多波段长波红外探测器组件在冷光学系统中的应用要求,本文分析了低温光学用多波段长波红外探测器封装的难点。本团队通过研究4个512×12模块呈品字形拼接后与4个三波段集成滤光片的低温配准、组件在200 K低温光窗的支撑与隔热、探测器与制冷机耦合应力等封装技术,提出了可以实现三波段集成滤光片与探测器背套对中误差在10μm以下的配准方法以及红外探测器杜瓦组件柔性波纹外壳实现101 mW隔热的方案,同时在杜瓦冷平台上设计了物理隔离耦合应力的多层热层结构,解决了多波段长波红外探测器组件的低光串、低背景辐射、低功耗、冷平台高温度均匀性和探测器高可靠性等关键技术,成功研制了低温光学用12.5μm三波段长波2000×12元红外探测器制冷组件。一系列空间环境适应性试验验证结果表明,试验前后组件的性能未发生明显变化,能够满足工程化应用要求。
Objective Most current advanced optical systems employ low-temperature optical technology to cool the optical lens to a lower temperature level to reduce optomechanical radiation and enhance the detection sensitivity and dynamic range of remote sensing instruments, which helps to enhance the detection performance of optical remote sensing instruments. This research focuses on the packaging technologies that are required for the engineering application of multiband longwave infrared detectors for cryogenic optics, including multimodule splicing and multiband integrated filter lowtemperature registration, support and heat insulation of low-temperature optical windows of modules, and coupling stress between detectors and refrigerators. Through systematic investigation, the multiband long-wave infrared detector’s Dewar for low-temperature optics has been successfully developed, and it has been confirmed by a series of space environment adaptability tests. Methods 1. Low-temperature module splicing registration and four three-band integrated filters. The filter was designed based on the imaging optical path. The closer the filter was to the chip, the smaller the non-uniformity, stray radiation energy, and the detector image surface’s stray ratio. To enhance the detector image plane’s uniformity, the filter in the Dewar package should be as close to the chip as possible(Fig. 5). Detectors and filters were packaged as follows: 1) four three-band detectors were spliced and cemented on the ceramic substrate, and the flatness of the cemented surface of the ceramic substrate detector’s gemstone was controlled to be less than 5 μm;2) the four integrated filters were preliminarily bonded to the filter holder, and the splicing accuracy was controlled in the range from-3 μm to +3 μm;3) the filter holder was aligned with the detector’s center, ensuring the alignment accuracy was in the range from-5 μm to +5 μm.2. The design of the flexible bellows shell’s thermal insulation structure. We proposed a Dewar flexibl
作者
陈俊林
王小坤
朱海勇
曾智江
李亚冉
罗少博
王溪
林春
Chen Junlin;Wang Xiaokun;Zhu Haiyong;Zeng Zhijiang;Li Yaran;Luo Shaobo;Wang Xi;Lin Chun(State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Acadamy of Sciences,Shanghai 200083,China;Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2022年第21期186-192,共7页
Chinese Journal of Lasers
基金
地球大数据科学工程(XDA19010102)
国家重点研发计划(2016YFB0500400)。
关键词
探测器
杜瓦组件
低温光学
低温系统集成
detector
Dewar assembly
cryogenic optics
cryogenic system integration
