摘要
主要研究了水基和水膜辅助这两种不同水辅助方式对飞秒激光高温合金逐层逐圈切孔质量的影响,对比分析了不同水辅助方式下激光脉冲重复频率变化对微孔出入口孔径、锥度、内壁形貌和内壁粗糙度的影响。实验结果表明:水基和水膜辅助均可以改善飞秒激光制造微孔的质量,微孔锥度减小,微孔内壁粗糙度减小,且水基辅助的改善效果更明显。当激光脉冲能量为80μJ,脉冲重复频率在100kHz左右时,水基辅助飞秒激光制孔可以获得较好的孔内壁质量,同时相比于空气中孔的锥度减少18.04%。随着激光脉冲重复频率的增加,两种水辅助条件下微孔的出入口孔径和锥度均先减小后增大,其中水基辅助下的微孔内壁粗糙度数值变化不大,水膜辅助下微孔内壁粗糙度数值不断增加。实验结果为优化水辅助飞秒激光制孔工艺提供了参考。
The effects of water-based and water film assisted methods on the hole quality of femtosecond laser layered-ring trepanning on superalloy was studied.The influence of the laser pulse repetition rate on the hole entrance/exit diameter,taper angle,hole sidewall morphology and hole sidewall roughness under different water assisted methods were compared and analyzed.The results shown that both water-based and water film assistance could improve the quality of femtosecond laser drilling,reduced the hole taper angle and the sidewall roughness,and the improvement effect of water-based assistance was more obvious.When the laser pulse energy was 80μJ and the pulse repetition rate was 100kHz,the quality of hole sidewall was better with water-based assistance,and the taper of the hole was reduced by 18.04%compared with that in air.With the increase of laser pulse repetition rate,the hole entrance/exit diameter and taper angle decreased firstly and then increased under the two waterassisted conditions,the changes of hole sidewall roughness were not obvious with water-based assistance,but the hole sidewall roughness with water film assistance increased continuously.The experimental results provided a reference for optimizing the water-assisted femtosecond laser drilling.
作者
任乃飞
杨华宇
夏凯波
Ren Naifei;Yang Huayu;Xia Kaibo(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2022年第12期120-129,共10页
Infrared and Laser Engineering
基金
国家自然科学基金面上项目(51975261)
国家自然科学基金区域创新发展联合基金重点项目(U21A20138)。
关键词
飞秒激光
水辅助
激光逐层逐圈切孔
脉冲重复频率
高温合金
femtosecond laser
water assistance
laser layered-ring trepanning
pulse repetition rate
superalloy
