摘要
霍尔传感器由于自身的高失调电压和低磁场灵敏度限制了应用,基于SMIC 180 nm互补金属氧化物半导体(CMOS)工艺,设计了一种阈值可调三维霍尔开关型传感器。在霍尔传感器的信号处理电路中,使用四相旋转电流法和相关双采样保持技术对霍尔器件的失调电压进行消除;设计了一种阈值可调电路,实现多种情况的应用;通过失调消除电路的处理,降低了失调。传感器的工作电压为3.3 V,工作电流为7 mA,信号处理电路对微弱的霍尔信号实现了放大,最终输出表示开关状态的数字信号。
The Hall sensor has limited applications due to its high offset voltage and low magnetic field sensitivity.Based on the SMIC 180 nm complementary metal oxide semiconductor(CMOS)process,a three-dimensional Hall switch sensor with adjustable threshold is designed.In the signal processing circuit of the Hall sensor,the four-phase spinning-current technology and the correlated double sample-and-hold technology is used to eliminate the offset voltage of the Hall device;an adjustable threshold circuit is designed to achieve a variety of applications;through the offset eliminate the processing of the circuit and reduce the offset.The working voltage of the sensor is 3.3 V and the working current is 7 mA.The signal processing circuit amplifies the weak Hall signal,and finally outputs a digital signal representing the switch state.
作者
卢伟业
魏榕山
蔡魏威
LU Weiye;WEI Rongshan;CAI Weiwei(College of Physics and Information Engineering,Fuzhou University,Fuzhou 350116,China)
出处
《传感器与微系统》
CSCD
北大核心
2023年第1期83-86,共4页
Transducer and Microsystem Technologies
基金
国家重点研发计划资助项目(2018YFB0407603)。
关键词
霍尔传感器
磁场灵敏度
失调电压
旋转电流技术
阈值可调
Hall sensor
magnetic field sensitivity
offset voltage
spinning-current technology
adjustable threshold