摘要
硅基微显示器以单晶硅为衬底,背板中集成CMOS驱动电路,具有体积小、像素密度高、开关速度快、功耗低等特性,在近眼显示、投影、增强现实/虚拟现实(AR/VR)等领域具有广泛应用。综述数字微镜器件(DMD)、硅基液晶(LCoS)、硅基有机发光(OLED on silicon)、硅基二极管发光(硅基micro-LED)4种硅基微显示器,重点论述硅基OLED和硅基micro-LED的关键技术和研究进展。这些硅基微显示器具有主动发光、高分辨率、高刷新率、高对比度、低功耗等突出特点,在近眼显示领域拥有巨大的应用潜力。
Silicon-based microdisplays are based on single crystalline Si molecules,with a CMOS drive circuit integrated into their backplanes.Recently,these microdisplays have been widely used in near-to-eye display,projection,and augmented reality/virtual reality(AR/VR)fields due to their small size,high pixel density,fast switching speed,and low power consumption.Therefore,because of their emerging importance,this study reviewed four silicon-based microdisplays:digital mirror device(DMD),liquid crystal on silicon(LCoS),organic light emitting diode on silicon(OLED on silicon),and silicon-based micro-light-emitting diode(micro-LED on silicon).Then,we discussed the key technologies and research progresses of the OLED on silicon and micro-LED on silicon in detail.Consequently,our study proposed that their outstanding active luminescence,high resolution,high refresh ability,high contrast,and low power consumption characteristics show great application potential in near-to-eye display fields.
作者
季渊
许怡晴
陈宝良
张引
穆廷洲
Ji Yuan;Xu Yiqing;Chen Baoliang;Zhang Yin;Mu Tingzhou(Microelectronic R&D Center,Shanghai University,Shanghai 200444,China;School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200444,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2022年第20期84-95,共12页
Laser & Optoelectronics Progress
