摘要
微间距放电特性是影响设备微型化发展的重要因素之一,为深入探究微间距放电在不同环境下的特性,搭建试验平台,进行了微间距不同气压气体放电及沿聚酰亚胺薄膜(PI)表面放电试验。在1~100 kPa气体放电试验中,发现电极间距大于10μm时的击穿电压随气压的走势与间距小于10μm时的走势存在较大差异,主要原因是电极间距小于10μm时,击穿过程受到离子增强场致发射效应影响。间距大于10μm时,击穿电压随气压变化的敏感度与电极间距成正相关;而间距小于10μm时,由于碰撞电离程度较低,其敏感度显著降低,且随着气压的升高而下降。大气压下对比纯气隙与沿PI表面放电,电极间引入PI薄膜后,击穿电压有了一定的降低,相较于纯气隙放电,沿面击穿电压对电极间距的敏感度更低。
Micro-gap discharge characteristics are one of the important factors affecting the development of equipment miniaturization,in order to deeply study the characteristics of micro-gap discharges in different environments a precision experimental platform was built and micro-pitch gas discharge and interlayer flash discharge experiments along the PI film surface were carried out.In the gas discharge experiment,the adjustable air pressure environment of 1~100 kPa was obtained through the vacuum bin,and it was found that the breakdown voltage with air pressure above 10μm showed a large difference with the trend below 10μm,the main reason for the difference in curve trend is that when the electrode spacing is less than 10μm,the breakdown process is affected by the ion-enhanced field emission effect.When the distance is greater than 10μm,the sensitivity of breakdown voltage to pressure changes is positively correlated with the electrode distance.When the distance is less than 10μm,due to the weak impact ionization process,its sensitivity is reduced,and with the increase in air pressure gradually decreases.Comparing pure air gap and flashover discharge,the introduction of PI films between the electrodes results in a significant reduction in breakdown voltage,but flashover discharge has a lower rate of change in breakdown voltage to electrode spacing.
作者
贾斌
赵来军
李彦森
陈芸
孙岩洲
JIA Bin;ZHAO Laijun;LI Yansen;CHEN Yun;SUN Yanzhou(School of Electrical Engineering and Automation,Henan Polytechnic University,Jiaozuo 454000,China)
出处
《电工技术》
2022年第19期53-57,共5页
Electric Engineering
基金
国家自然科学基金项目(编号U1804143)。
关键词
微间距放电
气体放电
气压
敏感度
表面放电
micro-gap discharge
gas discharge
air pressure
sensitivity
surface flashover
