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Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator

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摘要 The use of nanoparticles has been growing in various industrial fields,and concerns about their effects on health and the environment have been increasing.Hence,characterization techniques for nanoparticles are essential.Here,we present a silicon dioxide microfabricated suspended microchannel resonator(SMR)to measure the mass and concentration of nanoparticles in a liquid as they flow.We measured the mass detection limits of the device using laser Doppler vibrometry.This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle,when sampled every 30 ms.We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR.Finally,we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR.
出处 《Microsystems & Nanoengineering》 SCIE EI CSCD 2022年第4期261-270,共10页 微系统与纳米工程(英文)
基金 the research project titled NFP4CryoEM with project number 13711,which is(partly)funded by the Netherlands Organisation for Scientific Research(NWO-TTW) Tomás Manzaneque acknowledges funding from the European Union’s Horizon 2020 research and innovation programme under the Marie SkłodowskaCurie grant agreement No.707404。
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