摘要
This paper examines the selection and performance evaluation of a variety of piezoelectric materials for cantilever-based sensor applications.The finite element analysis method is implemented to evaluate the relative importance of materials properties such as Young's Modulus(E),piezoelectric stress constants(e_(31)),dielectric constant(ε)and Poisson's ratio(ν)for cantilever-based sensor applications.An analytic hierarchy process(AHP)is used to assign weights to the properties that are studied for the sensor structure under study.A technique for order preference by similarity to ideal solution(TOPSIS)is used to rank the performance of the piezoelectric materials in the context of sensor voltage outputs.The ranking achieved by the TOPSIS analysis is in good agreement with the results obtained from finite element method simulation.The numerical simulations show that K_(0.5)Na_(0.5)NbO_(3)-LiSbO_(3)(KNN-LS)materials family is important for sensor application.Young's modulus(E)is most influencing material's property followed by piezoelectric constant(e_(31)),dielectric constant(ε)and Poisson's ratio(ν)for cantilever-based piezoelectric sensor applications.
