摘要
垂直腔面发射激光器(VCSEL)器件的分布式布拉格反射镜(DBR)设计十分重要,关乎VCSEL的激光输出。研究Ta_(2)O_(5)/SiO_(2)、AlN/GaN制备的DBR上下混合使用对VCSEL器件性能的影响。研究发现,底层10个周期的Ta_(2)O_(5)/SiO_(2)全反射DBR和顶层40个周期的AlN/GaN部分反射DBR设计的蓝光VCSEL器件激光输出较强,DBR底层、顶层互换的底层50个周期的AlN/GaN全反射DBR和顶层4个周期的Ta_(2)O_(5)/SiO_(2)部分反射DBR设计的蓝光VCSEL器件激光输出较强。
The distributed Bragg reflector(DBR)design of the vertical cavity surface emitting laser(VCSEL)device is very important,which is related to the laser output of the VCSEL.In this paper,the effect of mixed use of DBR made of Ta_(2)O_(5)/SiO_(2)and AlN/GaN on the performance of VCSEL devices is studied.The research found that the blue VCSEL devices designed with 10 cycles of Ta_(2)O_(5)/SiO_(2)total reflection DBR on the bottom layer and AlN/GaN partial reflection DBR on the top layer with 40 cycles have strong laser output;The laser output of blue VCSEL devices designed by total reflection DBR and Ta_(2)O_(5)/SiO_(2)2 partial reflection DBR with 4 periods in the top layer is stronger.
作者
黄晶
游雨云
程智君
Huang Jing;You Yuyun;Cheng Zhijun(Shangrao Vocational&Technical College,Shangrao 334109,Jiangxi,P.R.China)
出处
《灯与照明》
2022年第3期56-58,共3页
Light & Lighting
